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首页> 外文期刊>Journal of Microelectromechanical Systems >Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching
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Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching

机译：各向异性腐蚀连续细胞自动机的解析解

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The fabrication of micro- and nanoelectromechanical systems (MEMS/NEMS) is based on a wide variety of growth and etching technologies sequentially applied throughout process flows which may involve a dozen or more steps, their realistic simulation having become an essential part of the overall design. By focusing in the simulation of anisotropic etching as a complex example of microfabrication, in this paper, we show how to solve analytically the time evolution of the continuous cellular automaton method, thus providing a particularly suitable choice for the realization of realistic simulations for MEMS and NEMS applications. This paper presents a complete theoretical derivation of the analytical solution based on geometrical and kinetic aspects of step flow on any surface, including a new classification of the surface sites based on a mean-field treatment of the propagation of the steps. The results of the corresponding simulations are in good agreement with the experiments. The study can be seen as an example of a general procedure that is applicable to other interface propagation problems. $hfill$ [2007-0167]
机译：微型和纳米机电系统（MEMS / NEMS）的制造基于在整个工艺流程中依次应用的多种生长和蚀刻技术，该工艺可能涉及十几个步骤或更多步骤，其逼真的模拟已成为整个设计的重要组成部分。通过将各向异性蚀刻的仿真作为微细加工的一个复杂实例，本文展示了如何解析地解决连续胞自动机方法的时间演化问题，从而为实现MEMS和MEMS的真实仿真提供了一个特别合适的选择。 NEMS应用程序。本文介绍了基于任何表面上台阶流的几何和动力学方面的解析解决方案的完整理论推导，包括基于台阶传播的均值场处理对表面部位进行的新分类。相应的仿真结果与实验吻合良好。该研究可以看作是适用于其他接口传播问题的一般过程的示例。 $ hfill $ [2007-0167]

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