...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Microelectromechanical Systems >SU-8 Optical Accelerometers
【24h】

SU-8 Optical Accelerometers

机译：SU-8光学加速度计

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This paper presents the optimization and characterization of SU-8 quad beam optical accelerometers based on intensity modulation. An applied acceleration causes a misalignment between three waveguides, resulting in variation of losses. Mechanical simulations have focused on the evaluation of sensitivity and the design of a robust junction between the mechanical beams and the inertial mass. Results demonstrate that perfectly rounded structures show at least 4.4 times less stress than L-shaped counterparts. Optical simulation predicts that the optimal configuration in terms of sensitivity is obtained when the waveguides are not completely misaligned, since then losses are insensitive to variations in acceleration. Numerical sensitivities ranging between 11.12 and 32.14 dB/g have been obtained. Fabrication has been simplified, now requiring only two photolithographic steps and electroplating Cu as a sacrificial layer. Experimental results show a reproducible experimental sensitivity of at least 13.1 dB/g
机译：本文介绍了基于强度调制的SU-8四光束光学加速度计的优化和特性。施加的加速度导致三个波导之间的未对准，从而导致损耗变化。机械仿真的重点是灵敏度的评估以及机械梁与惯性质量之间的稳健连接设计。结果表明，完美倒圆的结构显示出的应力至少是L形结构的4.4倍。光学仿真预测，当波导未完全未对准时，可获得灵敏度方面的最佳配置，因为这样损耗对加速度的变化不敏感。数值灵敏度在11.12和32.14 dB / g之间。简化了制造过程，现在仅需要两个光刻步骤并电镀铜作为牺牲层。实验结果表明，可再现的实验灵敏度至少为13.1 dB / g

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号