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首页> 外文期刊>Microelectronic Engineering >Effect of upper surface characteristics on meniscus stability in immersion flow field
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Effect of upper surface characteristics on meniscus stability in immersion flow field

机译：浸没流场中上表面特性对弯液面稳定性的影响

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摘要

Liquid loss occurs at the receding contact line when scanning at high speeds resulting in defects on printed patterns in immersion lithography. To offer intuitive insights into the dynamic effects of the fluid confined between the lens and substrate on critical scan speeds, image processing techniques are explored to develop dynamic models for optimizing future designs of immersion units. Since the distance between the last lens and wafer is less than 1 mm, the dynamic characteristics of the liquid (with free boundary and characteristics of the upper surface of the flow field) play an important role in liquid control, which is concerned in various potential immersion unit designs. A method for characterizing the meniscus dynamics is developed to analyze the liquid behavior and meniscus stability in immersion lithography. A second-order system model is presented to better understand the meniscus development during scanning motion. Experimental results have shown that the meniscus adhering to the hydrophilic surface allows for a higher scanning speed than that adhering to the hydrophobic surface.
机译：高速扫描时，在后退接触线上会发生液体流失，从而导致浸没式光刻中的印刷图案出现缺陷。为了直观了解透镜和基板之间的流体对临界扫描速度的动态影响，探索了图像处理技术来开发动态模型，以优化浸没单元的未来设计。由于最后一个透镜与晶圆之间的距离小于1 mm，因此液体的动态特性（具有自由边界和流场上表面的特性）在液体控制中起着重要作用，这涉及到各种潜力浸没单元设计。开发了一种表征弯液面动力学的方法，以分析浸没式光刻中的液体行为和弯液面稳定性。提出了一个二级系统模型，以更好地了解扫描运动过程中弯液面的发展。实验结果表明，粘附在亲水表面上的弯液面比粘附在疏水表面上的弯液面具有更高的扫描速度。

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  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.1939-1943|共5页
  • 作者

    Ying Chen; Kok-Meng Lee; Xin Fu;

  • 作者单位

    The State Key laboratory of Fluid Power Transmission and Control Zhejiang University, Hangzhou 310027, China;

    George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405, USA;

    The State Key laboratory of Fluid Power Transmission and Control Zhejiang University, Hangzhou 310027, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    immersion lithography; meniscus stability; liquid loss; dynamic model; immersion unit;

    机译：浸没式光刻;弯液面稳定性;液体损失;动力学模型;浸没单元;

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