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首页> 外文期刊>Microelectronic Engineering >Piezoelectrically actuated MEMS microswitches for high current applications
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Piezoelectrically actuated MEMS microswitches for high current applications

机译：用于大电流应用的压电驱动MEMS微动开关

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摘要

In this work the fabrication of a piezoelectrically actuated microswitch for high current applications is proposed. In particular, the microswitch was properly designed to drive currents of the order of 1 A. The device was obtained assembling two silicon substrates: one containing the signal lines and the other enclosing a silicon nitride microcantilever. This latter operates as a switch by closing the circuit with a multilayered metal electrode on its tip. Four layers of lead zirconate titanate (PZT), deposited by sol-gel method, constitute the actuation element of the microcantilever. The bottom and top electrodes of the PZT were respectively made of thin Ti/Pt and Ti/Au layers, deposited by electron beam evaporation. The signal lines and the contact-electrode on the microcantilever tip were made of Ti/Ni/Au/Cu (with a total thickness of about 1 μm). The two substrates were finally bonded together by Au/Sn eutectic bonding.
机译：在这项工作中，提出了用于大电流应用的压电致动微动开关的制造。特别是，微动开关经过适当设计以驱动1 A量级的电流。该设备组装了两个硅基板：一个包含信号线，另一个包含氮化硅微悬臂梁。后者通过用尖端上的多层金属电极闭合电路来充当开关。通过溶胶-凝胶法沉积的四层钛酸锆钛酸铅（PZT）构成了微悬臂梁的驱动元件。 PZT的底部和顶部电极分别由通过电子束蒸发沉积的薄Ti / Pt和Ti / Au层制成。微悬臂梁尖端上的信号线和接触电极由Ti / Ni / Au / Cu（总厚度约为1μm）制成。最后，通过Au / Sn共晶结合将两个基板结合在一起。

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  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2208-2210|共3页
  • 作者

    D. Balma; A. Lamberti; S.L Marasso; D. Perrone; M. Quaglio; G. Canavese; S. Bianco; M. Cocuzza;

  • 作者单位

    Xlab, Materials and Microsystems Laboratory, Department of Materials Science and Chemical Engineering, Politecnico di Torino, Latemar Unit, Via Lungo Piazza d'Armi 6, IT 10034,Chivasso, Turin, Italy;

    Xlab, Materials and Microsystems Laboratory, Department of Materials Science and Chemical Engineering, Politecnico di Torino, Latemar Unit, Via Lungo Piazza d'Armi 6, IT 10034,Chivasso, Turin, Italy Center for Space Human Robotics, Italian Institute of Technology, Corso Trento 21, IT 10129, Torino, Italy;

    Xlab, Materials and Microsystems Laboratory, Department of Materials Science and Chemical Engineering, Politecnico di Torino, Latemar Unit, Via Lungo Piazza d'Armi 6, IT 10034,Chivasso, Turin, Italy;

    Xlab, Materials and Microsystems Laboratory, Department of Materials Science and Chemical Engineering, Politecnico di Torino, Latemar Unit, Via Lungo Piazza d'Armi 6, IT 10034,Chivasso, Turin, Italy;

    Center for Space Human Robotics, Italian Institute of Technology, Corso Trento 21, IT 10129, Torino, Italy;

    Center for Space Human Robotics, Italian Institute of Technology, Corso Trento 21, IT 10129, Torino, Italy;

    Center for Space Human Robotics, Italian Institute of Technology, Corso Trento 21, IT 10129, Torino, Italy;

    Xlab, Materials and Microsystems Laboratory, Department of Materials Science and Chemical Engineering, Politecnico di Torino, Latemar Unit, Via Lungo Piazza d'Armi 6, IT 10034,Chivasso, Turin, Italy CNR-IMEM, Parco Area delle Sdenze, 37a. IT43124, Parma. Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    mems; microswitch; microcantilever; pzt;

    机译：MEMS;微动开关;microcantilev is;mon;

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