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RF stability performance of SOI junctionless FinFET and impact of process variation

机译:SOI无结FinFET的RF稳定性能和工艺变化的影响

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摘要

In this paper we investigate the impact of process parameter variations such as temperature (T), channel doping concentration (N-D), Fin height (H-fin) and Fin width (W-fin) on Radio Frequency (RF) stability performance of 20 nm Silicon on Insulator Junctionless FinFET (SOI JLFinFET). The developed RF stability model provides relation between critical frequency (f(k)) and small signal parameters which can be optimized for improved stability. Results shows as temperature increases (27-200 C) cutoff frequency (f(T)) and maximum oscillation frequency (f(max)) reduced by 12% and 8% respectively also stability factor (K) decreases by 20% at high frequency. Increasing N-D, H-fin and W-fin increases f(T) and f(max) but degrades stability performance. The result also provides optimized design guideline for operating SOI JLFinFET under RF range.
机译:在本文中,我们研究了温度(T),沟道掺杂浓度(ND),鳍片高度(H-fin)和鳍片宽度(W-fin)等工艺参数变化对20的射频(RF)稳定性能的影响。绝缘体无结FinFET(SOI JLFinFET)上的纳米硅。所开发的RF稳定性模型提供了临界频率(f(k))与小信号参数之间的关系,可以对这些参数进行优化以提高稳定性。结果表明,随着温度的升高(27-200 C),截止频率(f(T))和最大振荡频率(f(max))分别降低了12%和8%,在高频下稳定系数(K)也降低了20% 。 N-D,H-fin和W-fin的增加会增加f(T)和f(max),但会降低稳定性能。结果还为在RF范围内操作SOI JLFinFET提供了优化的设计指南。

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