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A new MEMS based variable capacitor with wide tunability, high linearity and low actuation voltage

机译：一种新型的基于MEMS的可变电容器，具有宽可调性，高线性度和低驱动电压

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摘要

We have proposed a new RF MEMS variable capacitor to achieve high linearity, wide tunability and low actuation voltage. The idea is based on increasing the linear region in the gap between the plates of the capacitor. It is done by adding a fixed-fixed beam below the fixed-free beam. The fixed-free beam is one plate of the capacitor. The voltage is applied to the fixed-free beam. In the vicinity of the pull-in voltage, the fixed-free beam losses its equivalent stiffness. The fixed-fixed beam is located in the vicinity of pull in situation of the fixed-free beam. This condition increases the equivalent stiffness of the fixed-free beam and allows the beam to continue moving down linearly and consequently increases the maximum capacitance of the structure. Geometrical and material property effects of the second beam on the linearity, tunability and voltage are investigated. The governing nonlinear equation for static deflection of the beam based on the Euler-Bernoulli beam theory has been presented.
机译：我们提出了一种新型RF MEMS可变电容器，以实现高线性度，宽可调性和低激励电压。该想法基于增加电容器的极板之间的间隙中的线性区域。这是通过在自由固定梁下面添加固定固定梁来完成的。自由固定梁是电容器的一块板。电压施加到无固定梁。在引入电压附近，自由固定梁失去其等效的刚度。固定-固定梁位于自由-固定梁的牵引情况下。这种情况增加了自由固定梁的等效刚度，并允许梁继续线性向下移动，因此增加了结构的最大电容。研究了第二束的几何和材料特性对线性，可调性和电压的影响。提出了基于Euler-Bernoulli梁理论的梁静态挠度控制非线性方程。

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