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首页> 外文期刊>Microelectronics journal >Influence of the metallic absorption layer on the quality of thermal conductivity measurements by the transient thermo-reflectance method
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Influence of the metallic absorption layer on the quality of thermal conductivity measurements by the transient thermo-reflectance method

机译：金属吸收层对瞬态热反射法测量导热系数的影响

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摘要

This work investigates numerically the influence of a metallic absorption layer on the laser-based measurements of the thermal conductivity of dielectric (SiO_2) and semiconductor (Si) electronic materials. The validity of the approach and the obtained results are assessed by comparison with experimental measurements obtained for gold-covered silicon dioxide samples. The results reveal the presence of behaviors associated with thermally thin and thermally thick absorption layers, depending on the ratio between the thickness of the absorption layer and the heat penetration depth. Optimal performance of the transient thermo-reflectance method was found to exist for thicknesses of metal layers falling between the identified thermally thin and thermally thick layers.
机译：这项工作从数值上研究了金属吸收层对基于激光的电介质（SiO_2）和半导体（Si）电子材料的热导率测量的影响。通过与覆盖金的二氧化硅样品获得的实验测量值进行比较，评估了该方法和获得的结果的有效性。结果表明，取决于吸收层的厚度和热穿透深度之间的比率，存在与热薄和热厚吸收层相关的行为。对于金属层的厚度落在确定的热薄层和热厚层之间，发现存在瞬态热反射法的最佳性能。

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