This paper presents a novel micromachined electrostatically suspended gyroscope (MESG) based on non-silicon micro electro mechanical systems technology, which can measure dual-axis angular velocity and tri-axis linear acceleration. The position of the rotor is detected capacitively and controlled electrostatically. In order to levitate the rotor along the Z axis, a levitation control model based on integrated control strategy for the MESG is presented. The damping coefficient is calculated by finite element analysis and deduced by analytical solution. According to the analysis of the levitation control force of the rotor, a three-degree-of-freedom close-loop control model is constructed. The theoretical relationship between the proportional integral derivative control parameters and stiffness properties is deduced. Initial levitation simulation result shows that the control principle is reasonable, which shows quick-response performance and global stability. Furthermore, digitally controlled levitation circuits have been designed.
展开▼
