Nanospectroscopy Imaging Techniques: Using NSOM and TERS for Semiconductor Materials Imaging

Yu-Tung Yin; Hung-Ming Lin; Chia-Ching Wang; Mei-Hua Chou; Shih-Jie Chou; Yu-Shuan Kuo; DongHyun Kim; Liang-Yih Chen; Ching-Hsiang Chen

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Nanospectroscopy Imaging Techniques: Using NSOM and TERS for Semiconductor Materials Imaging

机译：纳米光谱成像技术：使用NSOM和TERS进行半导体材料成像

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In this article, we introduce the theory and instrumentation that is relevant to nanospectroscopy imaging techniques, including near-field scanning optical microscope (NSOM) and tip-enhanced Raman scattering (TERS) imaging. We also demonstrate the NSOM and TERS imaging functions in semiconductor samples. Our findings support the view that NSOM and TERS imaging techniques can increase the space resolution and emphasize the surface information for the target surface layer. Thus, these techniques are applicable to the studies of materials with nanoscale patterns in the future.

机译：在本文中，我们介绍与纳米光谱成像技术相关的理论和仪器，包括近场扫描光学显微镜（NSOM）和尖端增强拉曼散射（TERS）成像。我们还演示了半导体样品中的NSOM和TERS成像功能。我们的发现支持以下观点：NSOM和TERS成像技术可以提高空间分辨率并强调目标表层的表面信息。因此，这些技术将来可用于具有纳米级图案的材料的研究。

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来源
《Nanotechnology Magazine, IEEE》 |2017年第4期|14-19|共6页
作者
Yu-Tung Yin; Hung-Ming Lin; Chia-Ching Wang; Mei-Hua Chou; Shih-Jie Chou; Yu-Shuan Kuo; DongHyun Kim; Liang-Yih Chen; Ching-Hsiang Chen;
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正文语种 eng
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关键词
Raman scattering; Optical diffraction; Microscopy; Optical imaging; Optical scattering; Spectroscopy; Nanostructures;

机译：拉曼散射;光学衍射;显微镜;光学成像;光学散射;光谱学;纳米结构;

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Nanospectroscopy Imaging Techniques: Using NSOM and TERS for Semiconductor Materials Imaging

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