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Improvement of sensitivity of eddy current sensors for nano-scale thickness measurement of Cu films

机译：提高涡流传感器对铜膜纳米级厚度测量的灵敏度

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摘要

Measurement of nano-scale copper film thickness is of great importance in the semiconductor industry. The eddy current method is used for the purpose due to its non-destructive and fast dynamic response features. In this paper, an equivalent circuit model is used to get the relationship between the measurement sensitivity and sensor parameters. It is found that the internal resistance of an eddy current sensor plays a primary role in the improvement of the measurement sensitivity beside of the Q factor of the sensor. A simple experimental setup is established and a series of Cu films with the thicknesses ranging from 20 nm to 350 nm are prepared as test samples. Test results indicate that the sensitivity of an optimized sensor made of a lower resistant multi-wire Cu line has better sensitivity than that wound with a higher resistant single Cu wire under large lift-off.
机译：在半导体工业中，纳米级铜膜厚度的测量非常重要。涡流法因其无损和快速动态响应特性而被用于此目的。在本文中，使用等效电路模型来获得测量灵敏度和传感器参数之间的关系。已经发现，除了传感器的Q因子之外，涡电流传感器的内阻在提高测量灵敏度中起主要作用。建立了一个简单的实验装置，并准备了一系列厚度为20 nm至350 nm的Cu膜作为测试样品。测试结果表明，由低电阻多芯铜线制成的优化传感器的灵敏度要比在较大剥离下采用高电阻单根铜线绕制的传感器的灵敏度更高。

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  • 来源
    《NDT & E international》 |2014年第1期|53-57|共5页
  • 作者

    Zilian Qu; Qian Zhao; Yonggang Meng;

  • 作者单位

    State Key Laboratory ofTribology, Tsinghua University, Beijing 100084, China;

    State Key Laboratory ofTribology, Tsinghua University, Beijing 100084, China;

    State Key Laboratory ofTribology, Tsinghua University, Beijing 100084, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Eddy current sensor; Metal film thickness measurement; Sensitivity;

    机译：涡流传感器;金属膜厚度测量;灵敏度;

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