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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research >Characterization of imaging performance of a large-area CMOS active-pixel detector for low-energy X-ray imaging
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Characterization of imaging performance of a large-area CMOS active-pixel detector for low-energy X-ray imaging

机译：低能量X射线成像大面积CMOS有源像素检测器的成像性能表征

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摘要

We report the imaging characteristics of the recently developed large-area complementary metal-oxide-semiconductor (CMOS) active-pixel detector for low-energy digital X-ray imaging applications. The detector consists of a scintillator to convert X-ray into light and a photodiode pixel array made by the CMOS fabrication process to convert light into charge signals. Between two layers, we introduce a fiber-optic faceplate (FOP) to avoid direct absorption of X-ray photons in the photodiode array. A single pixel is composed of a photodiode and three transistors, and the pixel pitch is 96 μm. The imaging characteristics of the detector have been investigated in terms of modulation-transfer function (MTF), noise-power spectrum (NPS), and detective quantum efficiency (DQE). From the measured results, the MTF at the Nyquist frequency is about 20% and the DQE around zero-spatial frequency is about 40%. Simple cascaded linear-systems analysis has showed that the FOP prevents direct absorption of X-ray photons within the CMOS photodiode array, leading to a lower NPS and consequently improved DQE especially at high spatial frequencies.
机译：我们报告了针对低能量数字X射线成像应用的最新开发的大面积互补金属氧化物半导体（CMOS）有源像素探测器的成像特性。该检测器由将X射线转换为光的闪烁体和通过CMOS制造工艺制成的将光转换为电荷信号的光电二极管像素阵列组成。在两层之间，我们引入了光纤面板（FOP），以避免在光电二极管阵列中直接吸收X射线光子。单个像素由光电二极管和三个晶体管组成，像素间距为96μm。已经根据调制传递函数（MTF），噪声功率谱（NPS）和探测量子效率（DQE）研究了探测器的成像特性。根据测量结果，奈奎斯特频率的MTF约为20％，零空间频率附近的DQE约为40％。简单的级联线性系统分析表明，FOP阻止了CMOS光电二极管阵列中X射线光子的直接吸收，从而导致NPS降低，从而改善了DQE，尤其是在高空间频率下。

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    Chang Hwy Lim; Seungman Yun; Jong Chul Han; Ho Kyung Kim; Michael G. Farrier; Thorsten Graeve Achterkirchen; Mike McDonald; Ian A. Cunningham;

  • 作者单位

    School of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Republic of Korea;

    School of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Republic of Korea;

    School of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Republic of Korea;

    School of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Republic of Korea,Imaging Research Laboratories, Robarts Research Institute, 100 Perth Drive, London, Ontario, Canada NBA 5K8;

    Rad-icon Imaging, DALSA Corporation, Sunnyvale, CA 94085, USA;

    Rad-icon Imaging, DALSA Corporation, Sunnyvale, CA 94085, USA;

    Imaging Research Laboratories, Robarts Research Institute, 100 Perth Drive, London, Ontario, Canada NBA 5K8;

    Imaging Research Laboratories, Robarts Research Institute, 100 Perth Drive, London, Ontario, Canada NBA 5K8;

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  • 正文语种 eng
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  • 关键词

    cascaded model analysis; cmos; dqe; fiber-optic faceplate; mtf; nps;

    机译：级联模型分析;cmos;dqe;光纤面板;mtf;nps;

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