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Thermal and dynamic effects of laser irradiation of thin metal films

机译:激光辐照金属薄膜的热和动力效应

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The problem of irradiation of a thin gold film deposited on a glass substrate by a narrowly focused single femtosecond laser pulse is considered. Different surface structures can emerge depending on amount of radiation energy absorbed by an irradiated surface.The most important thermal driver for the formation of surface structures is the lateral electron heat flow in the film. This effect consists from three stages: (1) the distribution of the absorbed in the skin layer of laser energy from the frontal boundary of the film to the rear boundary to equalize the temperature; (2) lateral transfer of energy along the film from the center to the edges; (3) cooling and recrystallization of the heated region of the light spot. A model for the study of the effect is presented based on the two-temperature equations of S. I. Anisimov and coauthors and the semi-empirical wide-range equation of state of metal. The model takes into account Gaussian pulse absorption, electron thermal conductivity and electron-ion relaxation in the metal. If the invested energy is large enough, the shock-wave effect on the formation of holes in the film becomes possible. It includes following stages: (1) generation of a shock wave in the glass due to the transfer of energy from the metal; (2) spherization of the formed shock wave, i.e. transition from one-dimensional to two-dimensional propagation mode; (3) transverse propagation of the shock wave in the substrate along the boundary with the film; (4) accumulation of momentum of a film in direction of vacuum. Pressure behind the shock pushes material of a film away from the substrate. When material of a film accumulates enough momentum (and thus velocity in direction to vacuum) it loses connection with substrate. This leads to formation of a hole. Layers of backing material at the same time acting on film as the pistons. A hydrodynamic model for the study of holes formation based on the equations of hydrodynamics of the ideal Euler medium is presented.
机译:考虑了通过狭窄聚焦的单个飞秒激光脉冲辐照沉积在玻璃基板上的金薄膜的问题。根据被辐照表面吸收的辐射能量的多少,会出现不同的表面结构。形成表面结构最重要的热驱动因素是薄膜中的横向电子热流。该效果包括三个阶段:(1)从表层的前边界到后边界,激光能量在表皮层吸收的激光能量分布使温度均匀; (2)能量沿着薄膜从中心到边缘的横向转移; (3)冷却和重结晶光斑的加热区域。根据S. I. Anisimov和他的合著者的两个温度方程以及金属状态的半经验宽范围方程,提出了一个用于研究这种效应的模型。该模型考虑了金属中的高斯脉冲吸收,电子热导率和电子离子弛豫。如果投入的能量足够大,则可能对膜中的孔形成产生冲击波效应。它包括以下阶段:(1)由于能量从金属转移,在玻璃中产生冲击波; (2)形成的冲击波的球形化,即从一维传播模式向二维传播模式转变; (3)冲击波在基片中沿与膜的边界横向传播; (4)薄膜在真空方向上的动量积累。冲击后的压力将薄膜材料推离基材。当薄膜材料积聚足够的动量(以及真空方向上的速度)时,它将失去与基板的连接。这导致形成孔。背衬材料层同时作为活塞作用在薄膜上。提出了一种基于理想欧拉介质的流体动力学方程的成孔动力学模型。

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