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首页> 外文期刊>Optical and quantum electronics >Inducing LIPSS on multilayer thin metal films by femtosecond laser beam of different orientations
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Inducing LIPSS on multilayer thin metal films by femtosecond laser beam of different orientations

机译：由FemtoSecond激光束在不同方向上的多层薄金属膜上诱导嘴唇

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摘要

The occurrence of laser-induced periodic surface structures (LIPSS) has been known for a while. Multilayer thin films, like Al/Ti, are suitable for LIPSS formation and attractive for applications-due to their wearing behavior and corrosion resistance; LIPSS generation may improve their properties as well. LIPSS properties depend not only on the material but also on the beam characteristics, like wavelength, polarization and scanning directions, etc. After exposing with NIR femtosecond pulses from Coherent Mira 900 laser system in several beam exposures, we have analyzed the samples of thin metal film systems with Tescan Mira3 SEM and NTegra AFM. The formation of LIPSS is most probably due to the generation of surface plasmon polariton, through the periodic distribution of energy in the interaction zone which lead to thermal processes in layers and interfaces. Two types of LIPSS were generated, which differ in shape, orientation and in ablation pronounced or not. For consecutive interactions in the same direction, LIPSS maintained its orientation, while for orthogonal passes LIPSS with mutually orthogonal orientation were generated. LIPSS period fluctuated between 320 and 380 nm and structures with pronounced ablation have significantly smaller width. Probable mechanism is that for greater accumulated energy pronounced ablation takes place giving LIPSS in the form of trenches or grooves, while for less accumulated energy the buildup of the material-probably due to pronounced oxidation-lead to LIPSS in the form of hills or ridges.
机译：激光诱导的周期性表面结构（嘴唇）的发生已经已知一段时间已知。多层薄膜，如Al / Ti，适用于嘴唇形成和适用于应用 - 由于其磨损的行为和耐腐蚀性;嘴唇生成也可以改善它们的性质。嘴唇不仅取决于材料，还取决于光束特性，如波长，偏振和扫描方向等。在几个光束曝光中从连贯的Mira 900激光系统曝光，我们分析了薄金属的样品带Tescan Mira3 SEM和NTEGRA AFM的电影系统。唇部的形成是由于表面等离子体极性恒电的产生，通过相互作用区域中的能量的周期性分布，这导致层和界面中的热过程。产生两种类型的嘴唇，其形状，方向和消融明显或不具有。对于相同方向的连续相互作用，嘴唇保持其取向，而正交通过具有相互正交取向的嘴唇。嘴唇周期波动在320和380nm之间，并且具有明显消融的结构具有明显较小的宽度。可能的机制是，对于更大的累积能量，发光的消融发生在沟槽或凹槽的形式中呈现嘴唇，而对于较少的积累能量的能量 - 可能是由于在山丘或脊形式的嘴唇上引起的材料的增加。

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