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Micro all-glass fiber-optic accelerometers

机译:微型全玻璃光纤加速度计

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摘要

A micro all-glass fiber-optic accelerometer based on the extrinsic Fabry-Perot interferometer (EFPI) is developed. A microcantilever beam is fabricated using a femtosecond laser and assembled with a silica tube and a silica inertial mass. Two mirrors, the end face of the leading single-mode fiber and the inner glass/air interface of the cantilever beam, form an EFPI. When the accelerometer is subjected to the vibration along the fiber axis, the vibration is detected by interrogating the variation in the cavity length of the EFPI. The proposed accelerometer has a compact structure and high signal-to-noise ratio. Experimental results show that the sensitivity of 2.9 nm/g@500 Hz within the acceleration range of 0 to 3 g is achieved. The accelerometer can work within the frequency range of 100 to 1500 Hz.
机译:研制了一种基于外在法布里-珀罗干涉仪(EFPI)的微型全玻璃光纤加速度计。使用飞秒激光制造微悬臂梁,并与石英管和石英惯性质量块组装在一起。两个反射镜,即前导单模光纤的端面和悬臂梁的内部玻璃/空气界面,形成了EFPI。当加速度计沿纤维轴受到振动时,可通过询问EFPI腔长度的变化来检测振动。所提出的加速度计具有紧凑的结构和高的信噪比。实验结果表明,在0至3 g的加速度范围内,灵敏度为2.9 nm / g @ 500 Hz。加速度计可以在100至1500 Hz的频率范围内工作。

著录项

  • 来源
    《Optical engineering》 |2018年第8期|087107.1-087107.6|共6页
  • 作者单位

    Beijing Institute of Technology, School of Optics and Photonics, Beijing, China;

    Beijing Institute of Technology, School of Optics and Photonics, Beijing, China;

    Beijing Institute of Technology, School of Optics and Photonics, Beijing, China;

    Beijing Institute of Technology, School of Optics and Photonics, Beijing, China;

    Beijing Institute of Technology, School of Mechanical Engineering, Laser Micro/Nano Fabrication Laboratory, Beijing, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    fiber optic sensors; accelerometers; extrinsic Fabry-Perot interferometer; femtosecond laser fabrication;

    机译:光纤传感器;加速度计外在法布里-珀罗干涉仪;飞秒激光制造;

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