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Optimization of pencil beam f-theta lens for high-accuracy metrology

机译：用于高精度测量的笔形f-theta镜头的优化

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摘要

Pencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An Mheta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the Mheta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of Mheta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an Mheta system is not well-designed, aberrations of the Mheta system will introduce many systematic errors into the measurement. A least-squares' fitting procedure was used to optimize the configuration parameters of an Mheta system. Simulations using ZEMAX software showed that the optimized Mheta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam Mheta optical system can be optimized with the help of this optimization method.
机译：笔形束偏转分析仪是同步加速器设备中用于X射线镜的高精度表面坡度计量的常用仪器。 Mheta光学系统是折光轮廓仪的关键光学组件，用于执行线性角度到位置的转换。 Mheta系统的传统优化程序与角度到位置的转换关系不直接相关，而是使用大尺寸的挡块和固定的工作距离执行，这意味着它们可能不适合使用Mheta系统的设计。工作距离范围内的小型铅笔束，用于超高精度计量。如果Mheta系统设计不当，则Mheta系统的像差会在测量中引入许多系统误差。最小二乘拟合程序用于优化Mheta系统的配置参数。使用ZEMAX软件进行的仿真表明，优化的Mheta系统显着抑制了由像差引起的角度到位置的转换误差。借助这种优化方法，可以优化任何笔形光束Mheta光学系统。

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  • 来源
    《Optical engineering》 |2018年第1期|015101.1-015101.7|共7页
  • 作者

    Chuanqian Peng; Yumei He; Jie Wang;

  • 作者单位

    Chongqing University of Technology, School of Science, Banan District, Chongqing, People's Republic of China;

    Chinese Academy of Sciences, Shanghai Institute of Applied Physics, Jiading District, Shanghai, People's Republic of China;

    Chinese Academy of Sciences, Shanghai Institute of Applied Physics, Jiading District, Shanghai, People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    deflectometric profiler; Fourier transform lens; least squares fitting; x-ray mirror; metrology; synchrotron radiation;

    机译：偏折轮廓仪傅立叶变换透镜;最小二乘拟合;X射线镜计量同步辐射;

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