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Quantitative aberration measurement with extended ptychographic iterative engine

机译：延长PTYCHOGUCT迭代发动机的定量像差测量

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摘要

A computational method is proposed to measure the aberration of a lens using an extended ptycho-graphic iterative engine. By reconstructing the entering wavefront Φ_(in) and exiting wavefront Φ_(ex) of the lens under detection from two sets of diffraction patterns iteratively, the lens aberration can be easily extracted by subtracting the phase of Φ_(in) and theoretical lens phase from the phase of Φ_(ex). Since it needs no extra reference beam and high quality optics, this suggested method has advantages of simplicity in structure, high accuracy, and low requirement on working environment, and it is free of the aberration of other optical elements in the experimental system, indicating it can find lots of applications in lens evaluation.
机译：提出了一种计算方法来使用扩展PTycho-图形迭代发动机测量镜头的像差。通过在从两组衍射图案中重构进入的波前φ_（in）和透镜的波前φ_（ex）迭代地，可以通过减去φ_（in）和理论透镜阶段的相位来容易地提取镜头像差φ_（前）的阶段。由于它不需要额外的参考光束和高质量的光学元件，因此该建议的方法具有简单的结构，高精度和对工作环境的低要求，并且在实验系统中没有其他光学元件的像差，表明它可以在镜头评估中找到许多应用。

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  • 来源
    《Optical engineering》 |2019年第5期|054102.1-054102.9|共9页
  • 作者

    Bangming Zong; Jiayun Luan; Zhilong Jiang; Yan Kong; Shouyu Wang; Cheng Liu;

  • 作者单位

    Jiangnan University School of Science Computational Optics Laboratory Wuxi Jiangsu China;

    Jiangnan University School of Science Computational Optics Laboratory Wuxi Jiangsu China;

    Jiangnan University School of Science Computational Optics Laboratory Wuxi Jiangsu China;

    Jiangnan University School of Science Computational Optics Laboratory Wuxi Jiangsu China;

    Jiangnan University School of Science Computational Optics Laboratory Wuxi Jiangsu China Nanjing Agricultural University Single Molecule Nanometry Laboratory (Sinmolab) Nanjing Jiangsu China;

    Jiangnan University School of Science Computational Optics Laboratory Wuxi Jiangsu China Chinese Academy of Sciences Shanghai Institute of Optics and Fine Mechanics Shanghai China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    extended ptychographic iterative engine; aberration measurements; diffraction imaging; wavefront retrieval;

    机译：扩展Ptychographic迭代引擎;像差测量;衍射成像;波前检索;

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