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首页> 外文期刊>Optical engineering >Suppression of span in sealed microcavity Fabry-Perot pressure sensors
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Suppression of span in sealed microcavity Fabry-Perot pressure sensors

机译：密封微腔法布里 - 珀罗压力传感器抑制跨度

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摘要

Optical microelectromechanical system pressure sensors working on the principle of extrinsic Fabry-Perot (FP) interferometer are designed and fabricated for pressure range of 1 -bar absolute. Anodic bonding of silicon with glass is performed under atmospheric pressure to form FP cavity. This process results in entrapment of gas in the sealed microcavity. The effect of trapped gas is investigated on sensor characteristics. A closed-loop solution is derived for the deflection of the diaphragm of a sealed microcavity pressure sensor. Phenomenon of "suppression of span" is brought out. The sensors are tested using white light interferometry technique. The residual pressure of the trapped gas is estimated from the experiments. The developed model has been used to estimate the deflection sensitivity of the free diaphragm and the extent of suppression of span after bonding.
机译：设计并制造了对外部法布里 - 珀罗（FP）干涉仪的原理的光学微机电系统压力传感器，用于1 -BAR绝对的压力范围。硅与玻璃的阳极键合在大气压下进行以形成FP腔。该过程导致密封微腔中的气体夹住。研究了捕获气体的影响对传感器特性。导出闭环溶液，用于密封微腔压力传感器的隔膜的偏转。提出了“跨度抑制”的现象。使用白色光干涉测量技术测试传感器。从实验估计捕获气体的残余压力。开发的模型已被用于估计自由膜片的挠曲灵敏度和粘接后跨度的抑制程度。

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