High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

Peter Ehbets; Hans Peter Herzig; Markku Kuittinen; Francis S. M. Clube; Yves Darbellay

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High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

机译：全内反射全息光刻技术制造的高载频扇出光栅

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Total internal reflection (TIR) holographic lithography is applied to the fabrication of binary diffractive optical elements with submi-crometer surface relief features. The recording conditions for the intermediate TIR volume hologram, used for high-resolution proximity printing, are discussed. In particular, the fabrication of efficient high-carrier-frequency fan-out gratings is considered and experimental results are presented for an off-axis 9 x 1 fan-out element in photoresist with a carrier frequency of 1000 lines/mm.

机译：全内反射（TIR）全息光刻技术被用于制造具有亚毫米级表面起伏特征的二元衍射光学元件。讨论了用于高分辨率接近打印的中间TIR体积全息图的记录条件。特别是，考虑了高效的高载频扇出光栅的制造，并给出了载流子为1000线/ mm的光致抗蚀剂中偏轴9 x 1扇出元件的实验结果。

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来源
《Optical engineering》 |1995年第8期|p.2377-2383|共7页
作者
Peter Ehbets; Hans Peter Herzig; Markku Kuittinen; Francis S. M. Clube; Yves Darbellay;
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作者单位

University of Neuchatel Institute of Microtechnology Rue Breguet 2 CH-2000 Neuchatel, Switzerland;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类光学仪器;
关键词
lithography; holography; gratings; optical interconnects;

机译：光刻;全息术;光栅;光学互连;

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1. Reflective Display Configurations Based on Total Internal Reflection and Grating-Grating Coupling of Holographic Polymer Dispersed Liquid Crystals (H-PDLC) [J] . Jun Qi, Matthew E. Sousa, Gregory P. Crawford Molecular crystals and liquid crystals . 2005,第0期

机译：基于全息聚合物分散液晶（H-PDLC）的全内反射和光栅-光栅耦合的反射显示配置
2. Surface relief subwavelength gratings by means of total internal reflection evanescent wave interference lithography [J] . Martinez-Anton JC Journal of optics, A. Pure and applied optics: journal of the European Optical Society . 2006,第4期

机译：全内反射reflection逝波干涉光刻技术的表面起伏亚波长光栅
3. Total internal reflection holographic gratings recorded in polymer-dispersed liquid crystals [J] . K. Beev, L. Criante, D.E. Lucchetta, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2006,第1期

机译：聚合物分散液晶中记录的全内反射全息光栅
4. An application of polymer holographic grating with the frustrated-total-internal-reflection coupling structure to wavelength-band selection for optical wireless communication [C] . Seunghwan Chung, Dongil Yeom, Seyoon Kim, Practical Holography XX: Materials and Applications . 2006

机译：整体内部反射耦合结构的聚合物全息光栅在光无线通信波段选择中的应用
5. Total internal reflection holographic microscopy (TIRHM) for quantitative phase characterization of cell-substrate adhesion. [D] . Ash, William Mason, III. 2010

机译：全内反射全息显微镜（TIRHM）用于定量量化细胞-基质粘附的相位。
6. Au Gratings Fabricated by Interference Lithography for Experimental Study of Localized and Propagating Surface Plasmons [O] . Viktor Dan’ko, Mykola Dmitruk, Ivan Indutnyi, 2017

机译：干涉光刻技术制备的金光栅用于表面等离激元的局域和传播实验研究
7. High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography [O] . Ehbets, Peter, Herzig, Hans-Peter, Kuittinen, Markku, 2007

机译：全内反射全息光刻技术制造的高载频扇出光栅

High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

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