...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Optical engineering >Absolute measurement method for correction of low-spatial frequency surface figures of aspherics
【24h】

Absolute measurement method for correction of low-spatial frequency surface figures of aspherics

机译：校正非球面低空间频率表面图形的绝对测量方法

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

An absolute measurement method involving a computer-generated hologram to facilitate the identification of manufacturing form errors and mounting- and gravity-induced deformations of a 300-mm aspheric mirror is proposed. In this method, the frequency and magnitude of the curve graph plotted from each Zernike coefficient obtained by rotating the mirror with various orientations about optical axis were adopted to distinguish the nonrotationally symmetric aberration. In addition, the random ball test was used to calibrate the rotationally symmetric aberration (spherical aberration). The measured absolute surface figure revealed that a highly accurate aspheric surface with a peak-to-valley value of 1/8 wave at 632.8 nm was realized after the surface figure was corrected using the reconstructed error map.
机译：提出了一种绝对测量方法，该方法包括计算机生成的全息图，以帮助识别300毫米非球面镜的制造形式误差以及安装和重力引起的变形。在该方法中，采用从通过围绕光轴旋转各种方向的反射镜获得的每个Zernike系数绘制的曲线图的频率和幅值来区分非旋转对称像差。另外，使用随机球测试来校准旋转对称像差（球面像差）。测得的绝对表面图表明，使用重建的误差图校正表面图后，可以实现高度精确的非球面表面，其峰谷值在632.8 nm处为1/8。

著录项

  • 来源
    《Optical engineering》 |2017年第5期|055101.1-055101.9|共9页
  • 作者

    Wei-Cheng Lin; Shenq-Tsong Chang; Cheng-Fang Ho; Ching-Hsiang Kuo; Chien-Kai Chung; Wei-Yao Hsu; Shih-Feng Tseng; Cheng-Kuo Sung;

  • 作者单位

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan,National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan;

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan;

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan;

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan;

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan;

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan;

    Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan;

    National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    computer-generated holograms; Zemike coefficient; absolute aspheric testing; random ball test; gravity distortion; mounting deformation;

    机译：计算机生成的全息图;Zemike系数;绝对非球面测试;随机球测试;重力畸变安装变形;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号