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首页> 外文期刊>Optical engineering >Nanopatterning of optical surfaces during low-energy ion beam sputtering
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Nanopatterning of optical surfaces during low-energy ion beam sputtering

机译：低能离子束溅射过程中光学表面的纳米构图

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摘要

Ion beam figuring (IBF) provides a highly deterministic method for high-precision optical surface fabrication, whereas ion-induced microscopic morphology evolution would occur on surfaces. Consequently, the fabrication specification for surface smoothness must be seriously considered during the IBF process. In this work, low-energy ion nanopatterning of our frequently used optical material surfaces is investigated to discuss the manufacturability of an ultrasmooth surface. The research results indicate that ion beam sputtering (IBS) can directly smooth some amorphous or amorphizable material surfaces, such as fused silica, Si, and ULE~® under appropriate processing conditions. However, for IBS of a Zerodur~® surface, preferential sputtering together with curvature-dependent sputtering overcome ion-induced smoothing mechanisms, leading to the granular nano-patterns' formation and the coarsening of the surface. Furthermore, the material property difference at microscopic scales and the continuous impurity incorporation would affect the ion beam smoothing of optical surfaces. Overall, IBS can be used as a promising technique for ultrasmooth surface fabrication, which strongly depends on processing conditions and material characters.
机译：离子束刻蚀（IBF）为高精度光学表面制造提供了一种高度确定性的方法，而离子诱导的微观形态演变将发生在表面上。因此，在IBF过程中必须认真考虑表面光滑度的制造规范。在这项工作中，我们经常使用的光学材料表面的低能离子纳米图案研究被讨论以讨论超光滑表面的可制造性。研究结果表明，离子束溅射（IBS）可以在适当的加工条件下直接使某些非晶态或非晶态材料表面变光滑，例如熔融石英，Si和ULE®。但是，对于Zerodur〜®表面的IBS，优先溅射与曲率相关溅射一起克服了离子诱导的平滑机制，导致形成了纳米颗粒状图案，并使表面变粗糙。此外，在微观尺度上的材料特性差异和连续的杂质掺入将影响光学表面的离子束平滑。总体而言，IBS可以用作超光滑表面制造的有前途的技术，这在很大程度上取决于加工条件和材料特性。

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  • 来源
    《Optical engineering》 |2014年第6期|065108.1-065108.6|共6页
  • 作者

    Wenlin Liao; Yifan Dai; Xuhui Xie;

  • 作者单位

    National University of Defense Technology, College of Mechatronics and Automation, Changsha 410073, China,Hu'nan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China;

    National University of Defense Technology, College of Mechatronics and Automation, Changsha 410073, China,Hu'nan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China;

    National University of Defense Technology, College of Mechatronics and Automation, Changsha 410073, China,Hu'nan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    ion beam sputtering; ion nanopatterning; optical material surface; ultrasmooth surface;

    机译：离子束溅射离子纳米图案光学材料表面超光滑表面;

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