首页> 外文会议>MRS fall meeting >Interplay between Morphology and Surface Transport in Nanopatterns Produced by Ion-Beam Sputtering
【24h】

Interplay between Morphology and Surface Transport in Nanopatterns Produced by Ion-Beam Sputtering

机译:离子束溅射在纳米图案中形态与表面传输之间的相互作用

获取原文

摘要

A "hydrodynamic" model has been proposed to describe nanopattern formation and dynamics on amorphous surfaces eroded by ion-beam sputtering (IBS), that relates to descriptions of pattern formation in macroscopic systems such as aeolian sand dunes. At variance with previous continuum models of the morphology of ion-sputtered surfaces, the dynamics of the species that diffuse along the surface is coupled in a natural way to that of the surface height. We report recent results for this model, considering normal and oblique ion incidence, for both fixed and rotating targets, and include comparison to recent experiments on silicon. Effective interface equations can be obtained, that generalize the anisotropic Kuramoto-Sivashinshy equation through additional conserved Kardar-Parisi-Zhang type nonlinear terms. In general dot or ripple patterns form, that later evolve exhibiting complex nonlinear dynamics. Thus, we observe interrupted coarsening behavior such that, for normal incidence, domains of hexagonally ordered structures appear, that compare favorably with those obtained in many experiments of nanodot formation by IBS. In other parameter regions, this short-range ordered patterns coexist with long range disorder and kinetic roughening. For oblique incidence, a ripple pattern is genetically obtained that also shows interrupted coarsening and other nonlinear features like non-uniform transverse motion, again reproducing experimental observations.
机译:已经提出了“流体力学”模型来描述纳米图案的形成和在离子束溅射(IBS)侵蚀的非晶表面上的动力学,该模型涉及宏观系统(如风沙丘)中图案的形成。与先前的离子溅射表面形态的连续模型不同,沿着表面扩散的物质的动力学以自然的方式耦合到表面高度。我们报告了该模型的最新结果,同时考虑了固定和旋转目标的正常和倾斜离子入射,并且包括了与最近在硅上进行的实验的比较。可以获得有效的界面方程,该方程通过附加的守恒的Kardar-Parisi-Zhang型非线性项来推广各向异性的Kuramoto-Sivashinshy方程。通常以点或波纹图案的形式出现,后来演变出呈现出复杂的非线性动力学。因此,我们观察到了间断的粗化行为,因此,对于垂直入射,出现了六边形有序结构域,这与许多由IBS形成纳米点的实验所获得的结果相比是有利的。在其他参数区域中,此短程有序模式与远程无序和动力学粗糙化并存。对于倾斜入射,通过遗传方式获得了波纹图案,该图案还显示出间断的粗化和其他非线性特征(例如不均匀的横向运动),再次再现了实验观察结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号