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Optimization of parameters for bonnet polishing based on the minimum residual error method

机译:基于最小残留误差法的阀帽抛光参数优化

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摘要

For extremely high accuracy optical elements, the residual error induced by the superposition of the tool influence function cannot be ignored and leads to medium-high frequency errors. Even though the continuous computer-controlled optical surfacing process is better than the discrete one, which can decrease this error to a certain degree, the error still exists in scanning directions when adopting the raster path. The purpose of this paper is to optimize the parameters used in bonnet polishing to restrain this error. The formation of this error was theoretically demonstrated and will also be further experimentally presented using our newly designed prototype. Orthogonal simulation experiments were designed for the following five major operating parameters (some of them are normalized) at four levels: inner pressure, z offset, raster distance, H-axis speed, and precession angle. The minimum residual error method was used to evaluate the simulations. The results showed the impact of the evaluated parameters on the residual error. The parameters in descending order of impact are as follows: raster distance, z offset, inner pressure, H-axis speed, and precession angle. An optimal combination of these five parameters among the four levels considered, based on the minimum residual error method, was determined.
机译:对于极高精度的光学元件,由刀具影响函数的叠加引起的残留误差不容忽视,并导致中高频误差。尽管连续的计算机控制的光学表面处理比离散的表面处理更好,可以在一定程度上减小此误差,但是在采用光栅路径时,该误差仍然存在于扫描方向上。本文的目的是优化用于阀盖抛光的参数,以抑制该误差。从理论上证明了此错误的形成,并且还将使用我们新设计的原型进一步通过实验进行介绍。针对以下五个主要操作参数(其中一些已标准化)在四个级别上设计了正交模拟实验:内部压力,z偏移,光栅距离,H轴速度和进动角。最小残留误差法用于评估仿真。结果显示了评估参数对残余误差的影响。按冲击降序排列的参数如下:栅格距离,z偏移,内部压力,H轴速度和进动角。基于最小残留误差方法,确定了所考虑的四个级别中这五个参数的最佳组合。

著录项

  • 来源
    《Optical engineering》 |2014年第7期|075108.1-075108.9|共9页
  • 作者单位

    Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, China,Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;

    Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, China;

    Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, China;

    Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, China;

    Fine Optical Engineering Research Center, Chengdu 610041, China;

    Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, China;

    Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    bonnet polishing; medium-high frequency error; minimum residual error; optimization;

    机译:引擎盖抛光中高频误差;最小残留误差;优化;

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