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Lateral and axial resolutions of an angle-deviation microscope for different numerical apertures:experimental results

机译：角度偏差显微镜在不同数值孔径下的横向和轴向分辨率：实验结果

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摘要

This paper presents a study of the lateral and axial resolutions of a transmission laser-scanning angle-deviation microscope (TADM) with different numerical aperture (NA) values. The TADM is based on geometric optics and surface plasmon resonance principles. The surface height is proportional to the phase difference between two marginal rays of the test beam, which is passed through the test medium. We used common-path heterodyne interferometry to measure the phase difference in real time, and used a personal computer to calculate and plot the surface profile. The experimental results showed that the best lateral and axial resolutions for NA = 0.41 were 0.5 μm and 3 nm, respectively, and the lateral resolution breaks through the diffraction limits.
机译：本文介绍了具有不同数值孔径（NA）值的透射激光扫描角偏差显微镜（TADM）的横向和轴向分辨率的研究。 TADM基于几何光学和表面等离子体激元共振原理。表面高度与穿过测试介质的测试光束的两条边缘射线之间的相位差成比例。我们使用共径外差干涉测量法实时测量相位差，并使用个人计算机计算和绘制表面轮廓。实验结果表明，NA = 0.41的最佳横向和轴向分辨率分别为0.5μm和3 nm，并且横向分辨率突破了衍射极限。

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  • 来源
    《Optical engineering》 |2011年第3期|p.47-53|共7页
  • 作者

    Ming-Hung Chiu; Chin-Fa Lai; Chen-Tai Tan; Yi-Zhi Lin;

  • 作者单位

    National Formosa University Department of Electro-Optical Engineering No. 64 Wunhua RoadHuwei Yunlin, 632, Taiwan;

    National Formosa University Department of Electro-Optical Engineering No. 64 Wunhua RoadHuwei Yunlin, 632, Taiwan;

    National Formosa University Department of Electro-Optical Engineering No. 64 Wunhua RoadHuwei Yunlin, 632, Taiwan;

    National Formosa University Department of Electro-Optical Engineering No. 64 Wunhua RoadHuwei Yunlin, 632, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    angle deviation microscopy; heterodyne interferometry; surface plasmon resonance; profile measurement.;

    机译：角度偏差显微镜外差式干涉仪表面等离子体共振;轮廓测量。;

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