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Fabrication of monomode channel waveguides in photosensitive polymer on optical adhesive

机译:在光学粘合剂上用光敏聚合物制备单模通道波导

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摘要

We present fabrication of optical waveguides in a photosensitive polymer. The process to fabricate monomode polymeric channel waveguides using simple direct ultraviolet (UV) photolithography is optimized. Channel waveguides of width ~2 to 2.4 μm and height ~1.8 to 2.2 μm are obtained on development after a crosslinkable negative tone epoxy SU-8 2002 polymer is exposed to UV through a photomask. Norland Optical Adhesive 61 (NOA 61) was used as under- and overclad. The average insertion loss obtained at chip-level is ~11 dB (TE_(00)) and ~12 dB (TM_(00)) for 2-cm waveguide at 1550 nm.
机译:我们目前在光敏聚合物中制造光波导。优化了使用简单的直接紫外线(UV)光刻技术制造单模聚合物通道波导的工艺。在将可交联的负性环氧SU-8 2002聚合物通过光掩模暴露于UV后,通过显影获得宽约2至2.4μm和高约1.8至2.2μm的通道波导。 Norland Optical Adhesive 61(NOA 61)用作下覆层。在1550 nm处的2 cm波导,在芯片级获得的平均插入损耗为〜11 dB(TE_(00))和〜12 dB(TM_(00))。

著录项

  • 来源
    《Optical engineering》 |2011年第9期|p.094601.1-094601.3|共3页
  • 作者单位

    Birla Institute of Technology and Science Electrical and Electronics Engineering Department Pilani, Rajasthan 333031 India;

    National Institute of Technology Karnataka Physics Department Surathkal 575025, India;

    Central Electronics Engineering Research Institute (Council of Scientific and Industrial Research) Optoelectronic Devices Group Pilani 333031, India;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    polymer waveguide; optical adhesive; ultraviolet lithography; monomode waveguide;

    机译:聚合物波导光学胶紫外线光刻单模波导;

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