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Recent advances in microdevices for transportation industry

机译：运输行业微设备的最新进展

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Advances in emerging technologies of microelectromechanical systems (MEMS) and nanotechnology, especially relating to the applications, constitute one of the most challenging tasks in today's microme-chanics and nanomechanics. In addition to design, analysis, and fabrication capabilities, this task also requires advanced test methodologies for determination of functional characteristics of devices produced to enable verification/validation of their operation, as well as refinement and optimization of specific designs. In particular, development of microdevices requires sophisticated tools, especially as these devices apply to transportation industry because of stringent safety and reliability requirements. These tools can be categorized as analytical, computational, and experimental. Solutions using the tools from any one category alone do not usually provide necessary information on MEMS, and extensive merging, or hybridization, of the tools from different categories is used. One of the approaches employed in this development of structures of contemporary interest is based on a combined use of the analytical, computational, and experimental solutions methodology. Development of this methodology was made possible by recent advances in optoelectronic methodology, which was coupled with the state-of-the-art computational methods, to offer a considerable promise for effective development of various designs. This approach facilitates characterization of dynamic and thermomechanical behavior of the individual components, their packages, and other complex material structures. In this paper, recent advances in optoelectronic methodology for microscale measurements are described and their use is illustrated with representative examples.
机译：微机电系统（MEMS）和纳米技术等新兴技术的进步，尤其是与应用有关的技术，构成了当今微机械和纳米力学中最具挑战性的任务之一。除了设计，分析和制造能力之外，此任务还需要先进的测试方法来确定所生产设备的功能特性，以使其能够验证/确认其操作以及特定设计的优化和优化。尤其是，微型设备的开发需要复杂的工具，尤其是由于严格的安全性和可靠性要求，这些设备适用于交通运输行业。这些工具可以分类为分析，计算和实验。仅使用任何一种类别的工具的解决方案通常都无法提供有关MEMS的必要信息，因此会使用不同类别的工具的广泛合并或混合。在发展具有当代意义的结构时采用的方法之一是基于分析，计算和实验解决方案方法的组合使用。光电方法学的最新进展使这种方法学的发展成为可能，再加上最先进的计算方法，为有效开发各种设计提供了可观的希望。这种方法有助于表征单个组件，其封装以及其他复杂材料结构的动态和热机械行为。在本文中，描述了用于微尺度测量的光电方法的最新进展，并举例说明了它们的使用。

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