Fabrication and investigation of 1D and 2D structures in LiNbO_3 thin films by pulsed laser ablation

F. Meriche; A. Boudrioua; R. Kremer; E. Dogheche; E. Neiss-Clauss; R. Mouras; A. Fischer; M-R. Beghoul; E. Fogarassy; N. Boutaoui

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Fabrication and investigation of 1D and 2D structures in LiNbO_3 thin films by pulsed laser ablation

机译：脉冲激光烧蚀在LiNbO_3薄膜中一维和二维结构的制备和研究

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Lithium niobate thin films were deposited on sapphire substrate by radio-frequency magnetron sputtering technique. One and two dimensional structures have been made using a KrF excimer laser at 248 nm and 6 ns pulse width, under various conditions of ablation, in order to assess the applicability of laser direct-writing of photonic waveguides. The optical and waveguiding properties of LiNbO_3 thin films were studied by prism-coupling technique, while micro-Raman spectroscopy was used for structural and composition characterization, as well as laser processing mechanism investigation. The surface morphology of the processed structures was obtained by a Nomarski optical microscope, an atomic force microscope and a White Light Interferometer Microscope.

机译：通过射频磁控溅射技术将铌酸锂薄膜沉积在蓝宝石衬底上。为了评估激光直接写入光子波导的适用性，已经在各种烧蚀条件下使用248 nm和6 ns脉冲宽度的KrF准分子激光器制作了一维和二维结构。通过棱镜耦合技术研究了LiNbO_3薄膜的光学和波导特性，同时采用显微拉曼光谱进行结构和组成表征以及激光加工机理的研究。通过Nomarski光学显微镜，原子力显微镜和白光干涉仪显微镜获得加工结构的表面形态。

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来源
《Optical Materials》 |2010年第11期|P.1427-1434|共8页
作者
F. Meriche; A. Boudrioua; R. Kremer; E. Dogheche; E. Neiss-Clauss; R. Mouras; A. Fischer; M-R. Beghoul; E. Fogarassy; N. Boutaoui;
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作者单位

Laboratoire d'Etude des Materiaux Universite de Jijel BP 98 Ouled Aissa 18000 Jijel Algeria;

Laboratoire de Physique des Lasers Unite mixte du CNRS -Universite Paris 13 France;

Laboratoire de Materiaux Optique Photonique et Systemes CNRS UMR 7132 Universite de Metz et Supelec 2 rue E. Belin 57070 Metz France;

Institut d'Electronique et de Microelectronique du Nord Villeneuve d'Ascq 59652 Lille France;

Laboratoire des Systemes Photoniques ENSPS Bd Sebastien Brant 67412 Illkirch France;

Institute for Materials and Processes University of Edinburgh King's Buildings Mayfield Road Edinburgh EH9 3JL Scotland UK;

Institut d'Electronique du Solide et des Systemes 23 rue du Loess 67037 Strasbourg France;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
lithium niobate; thin films; KrF excimer laser ablation; micro-structuring; photonic waveguiding structures;

机译：铌酸锂薄膜;KrF准分子激光烧蚀;微观结构;光子波导结构;

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1. Fabrication of LiNbO_3 thin films by pulsed laser deposition and investigation of nonlinear properties [J] . Y. NAKATA, S. GUNJI, T. OKADA, Applied Physics. A, Materials Science & Processing . 2004,第4a6期

机译：脉冲激光沉积制备LiNbO_3薄膜及非线性特性研究
2. Fabrication of nanostructured Al_2CuMg thin film by femtosecond pulsed laser ablation [J] . M. Jaime Vasquez, G.P. Halada, C.R. Clayton, Thin Solid Films . 2004,第1a2期

机译：飞秒脉冲激光烧蚀制备纳米Al_2CuMg纳米薄膜
3. Fabrication of YBa{sub}2Cu{sub}3O{sub}y thin films by YAG pulsed laser ablation method -influence of the target composition-ratio on the quality of films- [J] . Takeshi Kusumori, Hachizo Muto 名古屋工業技術研究所報告 . 1998,第3期

机译：YBA {Sub} 2CU {Sub} 3O {Sub} Y薄膜通过YAG脉冲激光烧蚀方法 - 目标成分比对薄膜质量的影响 -
4. Optimization of the Fabrication Parameters of PZT 52/48 Thin Films by Pulsed Laser Ablation [C] . J. R. A. Fernandes, E. Joanni, R. Savu International Materials Symposium (Materiais 2005) and XII Encontro da Sociedade Portuguesa de Materiais(SPM); 20050320-23; Aveiro(PT) . 2006

机译：脉冲激光烧蚀优化PZT 52/48薄膜的制备参数
5. Electrical properties and microstructure of tin dioxide thin films deposited by pulsed laser ablation for gas sensing applications . [D] . Dominguez, Juan Eduardo. 2003

机译：脉冲激光烧蚀沉积二氧化锡薄膜的电学性能和微观结构。
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Fabrication and investigation of 1D and 2D structures in LiNbO_3 thin films by pulsed laser ablation

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