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Structural and optical characterization of Ba_(0.8)Sr_(0.2)TiO_3 PLD deposited films

机译:Ba_(0.8)Sr_(0.2)TiO_3 PLD沉积膜的结构和光学表征

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摘要

Structural and optical properties of Ba_(0.8)Sr_(0.2)TiO_3(BST) ferroelectric thin films, deposited by the pulsed laser ablation (PLD) technique on Si/SiO_2/Ti/Pt, Si/SrRuO_3 and Si substrates, were performed by X-ray diffraction, micro Raman, atomic force microscopy (AFM), and optical reflectometry measurements. Temperature dependences of the Raman spectrum, and room temperature refractive and extinction indices, and surface roughness were evaluated.
机译:通过脉冲激光烧蚀(PLD)技术在Si / SiO_2 / Ti / Pt,Si / SrRuO_3和Si衬底上沉积Ba_(0.8)Sr_(0.2)TiO_3(BST)铁电薄膜的结构和光学性能X射线衍射,显微拉曼光谱,原子力显微镜(AFM)和光学反射法测量。评估了拉曼光谱的温度依赖性,室温折光和消光指数以及表面粗糙度。

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