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首页> 外文期刊>Optical Materials >Correlation between phase and optical properties of yttrium-doped hafnium oxide nanocrystalline thin films
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Correlation between phase and optical properties of yttrium-doped hafnium oxide nanocrystalline thin films

机译：钇掺杂氧化oxide纳米晶薄膜的相位与光学性质的相关性

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摘要

Yttrium-doped hafnium oxide (YDH) nanocrystalline films were produced by sputter-deposition at a substrate temperature of 400 ℃. The deposition was made onto Si (100) and optical grade quartz substrates with variable deposition time to produce YDH films in a wide range of thickness, d_(YDH) ～ 25 nm to 1.1 μm. The effect of d_(YDH) on the crystal structure, surface/interface morphology and optical properties of YDH films was investigated. X-ray diffraction analyses revealed the formation of monoclinic phase for relatively thin films (<150nm). The evolution towards stabilized cubic phase with increasing d_(YDH) is observed. The scanning electron microscopy results indicate the dense, columnar structure of YDH films as a function of d_(YDH). Spectrophotometry analyses indicate that the grown YDH films are transparent. The band gap was found to be ～5.60 eV for monoclinic YDH films while distinct separation and an increase in band gap to ～6.03 eV is evident with increasing d_(YDH) and formation cubic YDH films. A correlation between growth conditions, phase evolution, and optical properties of the YDH nanocrystalline films is established.
机译：在400℃的衬底温度下通过溅射沉积制备了钇掺杂的氧化ha（YDH）纳米薄膜。在具有可变沉积时间的Si（100）和光学级石英衬底上进行沉积，以生产厚度范围d_（YDH）〜25 nm至1.1μm的YDH膜。研究了d_（YDH）对YDH薄膜晶体结构，表面/界面形貌和光学性能的影响。 X射线衍射分析表明，相对较薄的薄膜（<150nm）形成了单斜晶相。观察到随着d_（YDH）的增加向稳定立方相的演化。扫描电子显微镜结果表明，YDH薄膜的致密柱状结构是d_（YDH）的函数。分光光度法分析表明，生长的YDH薄膜是透明的。发现单斜YDH膜的带隙为〜5.60 eV，而随着d_（YDH）和形成立方YDH膜的增加，明显的分离和带隙增加至〜6.03 eV是明显的。建立了生长条件，相演化和YDH纳米晶膜的光学性质之间的相关性。

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  • 来源
    《Optical Materials》 |2013年第9期|1728-1734|共7页
  • 作者

    A. Ortega; E.J. Rubio; K. Abhilash; C.V. Ramana;

  • 作者单位

    Department of Mechanical Engineering. University of Texas at El Paso El Paso TX 79968 USA Department of Materials Science and Engineering University of Texas at El Paso El Paso TX 79968 USA;

    Department of Materials Science and Engineering University of Texas at El Paso El Paso TX 79968 USA;

    Department of Electrical and Computer Engineering University of Texas at El Paso El Paso TX 79968 USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Y-doped hafnia; Thin films; Structure; Optical properties; Band gap;

    机译：掺Y的哈夫尼亚;薄膜;结构体;光学性质;带隙;

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