Formation of channel waveguide with grating in polymer films based on simultaneous photobleaching and embossing

S. Shibata; O. Sugihara; Y. Che; H. Fujimura; C. Egami; N. Okamoto

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Formation of channel waveguide with grating in polymer films based on simultaneous photobleaching and embossing

机译：基于光漂白和压花的同时在聚合物膜中用光栅形成沟道波导

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Channel waveguide with grating is fabricated in nonlinear optical (NLO) polymer thin films by means of simultaneous embossing and photobleaching. A combined structure of mask/master consisting of a photomask part and a grating die part which is made of polyimide is fabricated. Then the mask/master is set on the NLO polymer films and both embossing and photobleaching are performed simultaneously. Profiles of the replica grating and the channel waveguide are estimated.

机译：通过同时压印和光漂白，在非线性光学（NLO）聚合物薄膜中制造带有光栅的通道波导。制造了由光掩模部分和由聚酰亚胺制成的光栅模具部分组成的掩模/母盘的组合结构。然后，将掩模/母版设置在NLO聚合物薄膜上，并同时执行压花和光漂白。估计复制光栅和通道波导的轮廓。

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来源
《Optical Materials》 |2003年第3期|p.495-498|共4页
作者
S. Shibata; O. Sugihara; Y. Che; H. Fujimura; C. Egami; N. Okamoto;
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作者单位

Faculty of Engineering Department of Chemistry Shizuoka University 3-5-1 Johoku Hamamatsu 432-8561 Japan;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
channel waveguide; grating; nonlinear optical polymer; mask/master; replica;

机译：通道波导格栅非线性光学聚合物面具/大师;复制品;

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专利

1. Fabrication of optical waveguide components based-on embossing and photobleaching using electrooptic polymer film [J] . S. Shibata, O. Sugihara, Y. Che, 電子情報通信学会技術研究報告. 有機エレクトロニクス. Organic Material Electronics . 2001,第344期

机译：基于电光聚合物膜的压花和光漂白制造光波导部件
2. Fabrication of optical waveguide components based-on embossing and photobleaching using electrooptic polymer film [J] . S. Shibata, O. Sugihara, Y. Che, 電子情報通信学会技術研究報告. 光エレクトロニクス. Optoelectronics . 2001,第345期

机译：基于电光聚合物膜的压花和光漂白制造光波导部件
3. Fabrication of optical waveguide components based-on embossing and photobleaching using electrooptic polymer film [J] . S. Shibata, O. Sugihara, Y. Che, 電子情報通信学会技術研究報告. 有機エレクトロニクス. Organic Material Electronics . 2001,第344期

机译：基于电光聚合物膜的压花和光漂形成光波导组分的制造
4. Photoinscription of channel waveguides and grating couplers in azobenzene polymer thin films [C] . Christopher Barrett, Queens Univ., Kingston, Optoelectronic Integrated Circuits . 1997

机译：偶氮苯聚合物薄膜中通道波导和光栅耦合器的光敏刻印
5. Direct laser fabrication of diffraction gratings on polymer thin films and waveguides. [D] . Hutchinson, Glenn David. 2005

机译：在聚合物薄膜和波导上直接激光制造衍射光栅。
6. Polymer waveguide grating sensor integrated with a thin-film photodetector [O] . Fuchuan Song, Jing Xiao, Antonio Jou Xie, -1

机译：集成了薄膜光电探测器的聚合物波导光栅传感器
7. Photobleaching Characteristics and Application for Optical Waveguide of Polymer Films Containing .PI.-Conjugated Organic Dyes. [O] . Tomoaki SHIBATA, Toshiaki HATTORI, Shinji ONODERA, 1998

机译：含有.pi.-共轭有机染料的聚合物膜光波导的光漂白特性及应用。
8. Simultaneous Photoinduced Color Formation and Polymerization: The Formation ofHighly Colored Thin Films from Colorless Precursors Due to Formation of Triarylmethane Cations by Acid Generating Decomposition of Iodonium Salts [R] . Neckers, D. C., Ren, Y., Jager, W. F. 1996

机译：同时光诱导的颜色形成和聚合：由于酸生成碘盐分解而形成三芳基甲烷阳离子的无色前体形成高色薄膜

Formation of channel waveguide with grating in polymer films based on simultaneous photobleaching and embossing

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