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首页> 外文期刊>Optical Materials >Design, fabrication and assessment of an optomechanical sensor for pressure and vibration detection using flexible glass multilayers
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Design, fabrication and assessment of an optomechanical sensor for pressure and vibration detection using flexible glass multilayers

机译：使用柔性玻璃多层的压力和振动检测光学机械传感器的设计，制造和评估

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摘要

We introduce an easily implementable optomechanical device for pressure and vibration sensing using a multilayer structure on a flexible substrate. We present the design, fabrication and evaluation steps for a proof-of-concept device as well as optical glass components. The design steps include optical, mechanical, and optomechanical correlation simulations using the transfer matrix method, finite element analysis, geometric optics and analytical calculations. The fabrication part focuses on the deposition of multilayers on polymeric flexible substrates using the radio frequency sputtering technique. To investigate the quality of the glass coatings on polymeric substrates, atomic force microscopy and optical microscopy are also performed. Optical measurements reveal that, even after bending, there are no differences between multilayer samples deposited on the polymeric and SiO2 substrates. The performance assessment of the proof-of-concept device shows that the sensor resonance frequency is around 515 Hz and the sensor static response is capable of sensing from 50 Pa to 235 Pa.
机译：我们使用多层结构在柔性基板上引入易于可实现的光学力学装置，用于压力和振动感测。我们介绍了概念验证装置以及光学玻璃部件的设计，制造和评估步骤。设计步骤包括使用传递矩阵法，有限元分析，几何光学和分析计算的光学，机械和光学力学相关模拟。使用射频溅射技术，制造部分专注于多层在聚合物柔性基板上的沉积。为了研究聚合物基材上的玻璃涂层的质量，还进行原子力显微镜和光学显微镜。光学测量表明，即使在弯曲之后，也没有沉积在聚合物和SiO 2基材上的多层样品之间的差异。概念证明装置的性能评估表明，传感器谐振频率约为515Hz，传感器静态响应能够从50Pa到235 PA感测。

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  • 来源
    《Optical Materials》 |2021年第5期|111023.1-111023.10|共10页
  • 作者

    Sayginer O.; Bursi O.S.; Varas S.; Szczurek A.; Ferrari M.; Chiasera A.; Iacob E.; Lukowiak A.; Righini G.C.;

  • 作者单位

    Department of Civil Environmental and Mechanical Engineering University of Trento 38123 Trento Italy|IFN-CNR CSMFO Lab FBK Photonics Unit Via Alla Cascata 56/C 38100 Trento Italy;

    MNF Micro Nano Facility Centre for Materials and Microsystems Bruno Kessler Foundation Via Sommarive 18 38123 Trento Italy;

    IFN-CNR CSMFO Lab FBK Photonics Unit Via Alla Cascata 56/C 38100 Trento Italy;

    IFN-CNR CSMFO Lab FBK Photonics Unit Via Alla Cascata 56/C 38100 Trento Italy|Department of Mechanics Materials Science and Engineering Wroclaw University of Science and Technology Smoluchowskiego 25 50-370 Wroclaw Poland;

    IFN-CNR CSMFO Lab FBK Photonics Unit Via Alla Cascata 56/C 38100 Trento Italy;

    Institute of Low Temperature and Structure Research PAS Okolna 2 50-422 Wroclaw Poland;

    IFAC-CNR MIPLAB Laboratory Via Madonna Del Piano 10 50019 Sesto Fiorentino Italy;

    Department of Civil Environmental and Mechanical Engineering University of Trento 38123 Trento Italy|IFN-CNR CSMFO Lab FBK Photonics Unit Via Alla Cascata 56/C 38100 Trento Italy;

    IFN-CNR CSMFO Lab FBK Photonics Unit Via Alla Cascata 56/C 38100 Trento Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    1D photonic crystal; Flexible photonics; Glass photonics; Modeling; Optomechanical sensor; Pressure sensor; RF-Sputtering; Sensor design; Vibration sensor;

    机译：1D光子晶体;柔性光子学;玻璃光子学;建模;光学机械传感器;压力传感器;RF-溅射;传感器设计;振动传感器;

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