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首页> 外文期刊>Optics and Lasers in Engineering >Surface roughness measurement using spatial-average analysis of objective speckle pattern in specular direction
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Surface roughness measurement using spatial-average analysis of objective speckle pattern in specular direction

机译：使用物镜斑点方向的空间平均分析对表面粗糙度进行测量

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摘要

The speckle contrast method (SCM) and the light scattering method (LSM) are two of the most promising optical techniques for on-line surface roughness measurement of slightly-rough surface. However, due to the lack of capability in eliminating the influence from the diffuse component of scattered light, SCM and LSM are both sensitive to the variations of surface correlation length. Additionally, for LSM, the presence of speckle noise leads to fluctuations in the measuring results. To solve these problems, an approach based on the spatial-average analysis of the objective speckle pattern in the specular direction, simply called spatial-average method (SAM), is proposed. The SAM establishes the quantitative relationship between a new characteristic parameter extracted from the recorded speckle image and the rms surface roughness, eliminates to a large extent the influence of diffuse light component on the measuring results, and immunizes itself from the speckle noise. The theoretical foundation of SAM is given in details. A computer simulation is then performed to make comparisons among these three methods. Finally an experiment is presented.
机译：斑点对比法（SCM）和光散射法（LSM）是用于在线测量轻微粗糙表面的最有前途的光学技术中的两种。但是，由于缺乏消除散射光的散射分量影响的能力，SCM和LSM都对表面相关长度的变化敏感。此外，对于LSM，斑点噪声的存在会导致测量结果波动。为了解决这些问题，提出了一种基于在镜面方向上的目标斑点图案的空间平均分析的方法，简称为空间平均方法（SAM）。 SAM建立了从记录的斑点图像提取的新特征参数与rms表面粗糙度之间的定量关系，在很大程度上消除了散射光分量对测量结果的影响，并使自身免受斑点噪声的影响。详细介绍了SAM的理论基础。然后执行计算机仿真以对这三种方法进行比较。最后提出了一个实验。

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