Nondestructive analysis of coated periodic nanostructures from optical data

T. H. Ghong1 S.-H. Han1 J.-M. Chung1 J. S. Byun1 T. J. Kim1 D. E. Aspnes12 Y. D. Kim1* I. H. Park3 and Y.-W. Kim3

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Nondestructive analysis of coated periodic nanostructures from optical data

机译：从光学数据对涂层的周期纳米结构进行无损分析

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Optical data are essential for the accurate nondestructive determination of profiles of periodic structures in integrated-circuit technology. In rigorous coupled-wave analysis, the sample is generally modeled as layers consisting of a single material and the ambient. We extend present capabilities to the analysis of structures with overlayers and demonstrate our approach by determining quantitatively the thicknesses of top, sidewall, and bottom oxides of deliberately and naturally oxidized structures.

机译：光学数据对于集成电路技术中周期结构轮廓的准确无损确定至关重要。在严格的耦合波分析中，通常将样本建模为由单一材料和环境组成的层。我们将现有功能扩展到带有覆盖层的结构分析中，并通过定量确定有意和自然氧化的结构的顶部，侧壁和底部氧化物的厚度来展示我们的方法。

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《Optics Letters》 |2010年第5期|p.733-735|共3页
作者
T. H. Ghong1 S.-H. Han1 J.-M. Chung1 J. S. Byun1 T. J. Kim1 D. E. Aspnes12 Y. D. Kim1* I. H. Park3 and Y.-W. Kim3;
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1Nano-optical Property Laboratory and Department of Physics, Kyung Hee University, Seoul 130-701, Korea 2Department of Physics, North Carolina State University, Raleigh, North Carolina 27695, USA 3Department of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea;

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1. Nondestructive analysis of coated periodic nanostructures from optical data [J] . T. H. Ghong, S.-H. Han, J.-M. Chung, Optics Letters . 2010,第5期

机译：从光学数据对涂层的周期纳米结构进行无损分析
2. The validation of the parallel three-dimensional solver for analysis of optical plasmonic bi-periodic multilayer nanostructures [J] . Xingjie Ni, Zhengtong Liu, Alexandra Boltasseva, Applied Physics A: Materials Science & Processing . 2010,第2期

机译：平行三维求解器对光学等离子体双周期多层纳米结构分析的验证
3. The validation of the parallel three-dimensional solver for analysis of optical plasmonic bi-periodic multilayer nanostructures [J] . Xingjie Ni, Zhengtong Liu, Alexandra Boltasseva, Applied Physics A: Materials Science & Processing . 2010,第2期

机译：平行三维求解器对光学等离子体双周期多层纳米结构分析的验证
4. Validation of the parallel three-dimensional solver for analysis of optical plasmonic bi-periodic multilayer nanostructures [C] . Ni, Xingjie, Liu, Zhengtong, Boltasseva, Alexandra, CLEO;Conference on Lasers and Electro-Optics;Quantum Electronics and Laser Science Conference;QELS . 2010

机译：平行三维求解器对光学等离子体双周期多层纳米结构分析的验证
5. Optical properties of nanostructures: From random to periodic. [D] . Noh, Heeso. 2009

机译：纳米结构的光学性质：从随机到周期性。
6. Anisotropic optical transmission of femtosecond laser induced periodic surface nanostructures on indium-tin-oxide films [O] . Chih Wang, Hsuan-I Wang, Chih-Wei Luo, -1

机译：飞秒激光在铟锡氧化物薄膜上诱导的周期性表面纳米结构的各向异性光学透射
7. Surface structural features and optical analysis of nanostructured Cu-oxide thin film coatings coated via the sol-gel dip coating method [O] . Amun Amri, Kamrul Hasan, Hatem Taha, 2019

机译：溶胶 - 凝胶浸涂法涂覆型纳米结构Cu-氧化物薄膜涂层的表面结构特征和光学分析
8. Analysis of Enhanced Second-Harmonic Generation in Periodic Nanostructures using Modified Rigorous Coupled-Wave Analysis in the Undepleted- Pump Approximation [R] . Nakagawa, W. , Tyan, R. , Fainman, Y. 2002

机译：利用改进的严格耦合波分析在耗尽泵浦近似下增强周期纳米结构的二次谐波产生

Nondestructive analysis of coated periodic nanostructures from optical data

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