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Development, characterization, and processing of thin and thick inkjet-printed dielectric films

机译:薄和厚喷墨印刷介电膜的开发,表征和加工

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摘要

This work introduces the material and electrical characterization of two dielectric inks for use with inkjet printing fabrication and the realization of fully-printed multilayer electronic structures. The dielectric inks are categorized by the thickness of their per-layer profiles, where SU-8 polymer and poly(4-vinylphenol)-based solutions are utilized to realize thick (>4 urn) and thin (< 400 nm) inkjet-printed dielectric films, respectively. The material formulations for each ink are outlined in detail in order to achieve the desired viscosity and surface tension for optimal printing with a Dimatix inkjet printing system. Once printability and processing techniques are tuned and established, various material and electrical characterizations are performed, including printed profile measurement, multilayer profile tendencies, thermal reflow processing, UV-ozone surface energy modification, relative permittivity extraction, leakage current density, and dielectric breakdown voltage. Finally, the demonstration of fully-printed post-processed on-chip capacitors utilizing both thin and thick dielectric inks in conjunction with a silver nanoparticle-based metallic ink is presented and compared with other inkjet-printed capacitors.
机译:这项工作介绍了两种用于喷墨印刷制造的介电油墨的材料和电气特性,以及实现了完全印刷的多层电子结构。电介质油墨按其每层轮廓的厚度进行分类,其中SU-8聚合物和聚(4-乙烯基苯酚)基溶液用于实现喷墨打印的厚(> 4))和薄(<400 nm)介电膜。详细概述了每种墨水的材料配方,以实现所需的粘度和表面张力,以利用Dimatix喷墨打印系统实现最佳打印。一旦调整并确定了可印刷性和加工技术,便会执行各种材料和电气特性,包括印刷轮廓测量,多层轮廓趋势,热回流处理,紫外线臭氧表面能改性,相对介电常数提取,泄漏电流密度和介电击穿电压。最后,展示了使用稀薄和厚介电油墨以及基于银纳米粒子的金属油墨的全印刷后处理片上电容器的演示,并将其与其他喷墨印刷电容器进行了比较。

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