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首页> 外文期刊>Philosophical Magazine Letters >Simultaneous determination of thin-film inertia and shear stiffness using thickness-twist and face-shear modes of an AT-cut quartz resonator
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Simultaneous determination of thin-film inertia and shear stiffness using thickness-twist and face-shear modes of an AT-cut quartz resonator

机译：使用AT切割石英谐振器的厚度扭曲和面剪切模式同时确定薄膜惯性和剪切刚度

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摘要

We propose the use of thickness-twist (TT) and face-shear (FS) vibration modes of an AT-cut quartz crystal plate resonator for simultaneous determination of the inertia and stiffness of a thin film deposited on a crystal surface. A theoretical analysis using Mindlin's first-order theory for crystal plates is performed to demonstrate the idea. Expressions for the stiffness ratio and mass ratio between the thin film and the resonator are presented in terms of frequency shifts of FS and TT modes, which are experimentally measurable. A numerical example is given.View full textDownload full textKeywordsmechanics, elastic waves, sensorsRelated var addthis_config = { ui_cobrand: "Taylor & Francis Online", services_compact: "citeulike,netvibes,twitter,technorati,delicious,linkedin,facebook,stumbleupon,digg,google,more", pubid: "ra-4dff56cd6bb1830b" }; Add to shortlist Link Permalink http://dx.doi.org/10.1080/09500839.2012.718446
机译：我们建议使用AT切割石英板谐振器的厚度扭转（TT）和表面剪切（FS）振动模式来同时确定沉积在晶体表面的薄膜的惯性和刚度。使用Mindlin的一阶理论对晶体板进行了理论分析，以证明这一想法。薄膜和谐振器之间的刚度比和质量比的表达式以FS和TT模式的频移表示，可以通过实验测量。给出了一个数值示例。 google，more“，发布号：” ra-4dff56cd6bb1830b“};添加到候选列表链接永久链接http://dx.doi.org/10.1080/09500839.2012.718446

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