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Nanoscale electrical properties of cluster-assembled palladium oxide thin films

机译：团簇组装氧化钯薄膜的纳米电性能

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摘要

The electrical properties of cluster-assembled nanostructured palladium oxide (ns-PdO_x) thin films grown by supersonic cluster beam deposition have been characterized by means of a customized ac current-sensing atomic force microscope. Scanning impedance microscopy is shown to provide a deep picture of the electrical properties of thin nanostructured interfaces even in the case of very soft and poorly adherent films. In particular, the dielectric constant of ns-PdO_x can be quantitatively determined as well as its I-V characteristics. Moreover, the measurement of the tip-sample parasitic capacitance can be exploited to probe the overall mesoscale conductive character of thin films and to give a complementary and more precise view of the oxidation of ns-PdO_x obtained by x-ray photoemission spectroscopy.
机译：通过定制的交流电流感应原子力显微镜表征了通过超声速簇束沉积法生长的簇组装纳米结构氧化钯（ns-PdO_x）薄膜的电学性能。扫描阻抗显微镜显示出即使在非常柔软且附着力很差的薄膜的情况下也可以提供纳米结构薄界面电特性的更深层次的图像。特别地，可以定量确定ns-PdO_x的介电常数及其I-V特性。此外，可以利用对尖端样品寄生电容的测量来探测薄膜的总体中尺度导电特性，并给出通过X射线光电子能谱获得的ns-PdO_x氧化的互补且更精确的视图。

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  • 来源
    《Physical review》 |2009年第11期|963-970|共8页
  • 作者

    V. Cassina; L. Gerosa; A. Podesta; G. Ferrari; M. Sampietro; F. Fiorentini; T. Mazza; C. Lenardi; P. Milani;

  • 作者单位

    Dipartimento di Fisica and C.I.Ma.I.Na., Universita degli Studi di Milano, via Celoria 16, 20133 Milano, Italy;

    Dipartimento di Elettronica ed Informazione, Politecnico di Milano, P.zza L. da Vinci 32, 20133 Milano, Italy;

    Dipartimento di Fisica and C.I.Ma.I.Na., Universita degli Studi di Milano, via Celoria 16, 20133 Milano, Italy;

    Dipartimento di Elettronica ed Informazione, Politecnico di Milano, P.zza L. da Vinci 32, 20133 Milano, Italy;

    Dipartimento di Elettronica ed Informazione, Politecnico di Milano, P.zza L. da Vinci 32, 20133 Milano, Italy;

    Dipartimento di Fisica and C.I.Ma.I.Na., Universita degli Studi di Milano, via Celoria 16, 20133 Milano, Italy;

    Dipartimento di Fisica and C.I.Ma.I.Na., Universita degli Studi di Milano, via Celoria 16, 20133 Milano, Italy;

    C.I.Ma.I.Na. and Istituto di Fisiologia Generate e Chimica Biologica, Universita degli Studi di Milano, via Trentacoste 2, 20134 Milano, Italy;

    Dipartimento di Fisica and C.I.Ma.I.Na., Universita degli Studi di Milano, via Celoria 16, 20133 Milano, Italy;

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  • 正文语种 eng
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  • 关键词

    nanoscale materials and structures: fabrication and; electronic transport phenomena in thin films; atomic force microscopes;

    机译：纳米级材料和结构：制造和;薄膜中的电子传输现象;原子力显微镜;

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