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首页> 外文期刊>Plasma Science, IEEE Transactions on >Probe Diagnostics of Plasma Parameters in a Large-Volume Glow Discharge With Coaxial Gridded Hollow Electrodes
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Probe Diagnostics of Plasma Parameters in a Large-Volume Glow Discharge With Coaxial Gridded Hollow Electrodes

机译：同轴网格空心电极在大容量辉光放电中等离子体参数的探针诊断

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摘要

Results of the experimental investigation of glow discharge plasma created in a large-volume discharge chamber are presented. The discharge configuration consists of two coaxial gridded electrodes placed in a metallic vacuum chamber. The inner electrode and the chamber housing were grounded while time-varying power up to 2 kV with frequency 20 kHz was applied on the outer electrode. The discharge was created in air at a pressure of 50 Pa and in argon at pressures of 50 and 100 Pa. Measurements of plasma parameters were carried out with a single-probe technique using the commercial Impedans Langmuir Probe system. In order to perform time-resolved measurements, an additional synchronizing device was developed. Variation in time of such plasma parameters as electron temperature, charged particle densities, and electron energy distribution function was obtained during the experiments. It is shown that both electron temperature and density change slightly in time. Obtained results indicate that the plasma created in the considered chamber configuration is similar to the negative glow region of a direct-current glow discharge.
机译：介绍了在大容量放电室中产生的辉光放电等离子体的实验研究结果。放电配置由放置在金属真空室中的两个同轴栅格电极组成。将内部电极和腔室外壳接地，同时将高达2 kV的时变电源（频率为20 kHz）施加到外部电极上。放电是在空气中以50 Pa的压力产生的，在氩气中以50和100 Pa的压力产生的。血浆参数的测量是使用商业Impedans Langmuir Probe系统通过单探针技术进行的。为了执行时间分辨的测量，开发了另外的同步设备。实验过程中获得了诸如电子温度，带电粒子密度和电子能量分布函数等等离子体参数随时间的变化。结果表明，电子温度和密度随时间变化很小。获得的结果表明，在考虑的腔室配置中生成的等离子体类似于直流辉光放电的负辉光区域。

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