...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Plasma Science, IEEE Transactions on >Investigation of Variation Power and Additive Gas Effect on the $hbox{SF}_{6}$ Destruction Using Atmospheric Microwave Plasma Torch
【24h】

Investigation of Variation Power and Additive Gas Effect on the $hbox{SF}_{6}$ Destruction Using Atmospheric Microwave Plasma Torch

机译：大气微波等离子体炬对$ hbox {SF} _ {6} $破坏的变化功率和添加剂气体影响的研究

获取原文
获取原文并翻译 | 示例
   

获取外文期刊封面封底 >>

       
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

An atmospheric microwave plasma torch for the decomposition of $ hbox{SF}_{6}$ accompanying additive gases ($hbox{O}_{2}$ , compressed air) was investigated experimentally in this paper. Applied microwave power and additive gas species as effective parameters on destruction and removal efficiency (DRE) were considered. It was approved that compressed air is a more efficient additive gas for the removal of $ hbox{SF}_{6}$ compared to oxygen. Also, DRE is highly dependent on the variation of forward power. Highest efficiencies while using oxygen and compressed air as additive gases have been 98.4% and 99.1% (in 1100 W), respectively. In some case, the $hbox{N}_{2}$ was also used with $hbox{SF}_{6}$, resulting in a maximum efficiency (in 1100 W) of 99.4%. This paper approves that a microwave plasma torch sustained in atmospheric pressure can almost completely remove the $hbox{SF}_{6}$ in semiconductor industry.
机译：本文通过实验研究了大气微波等离子体炬，用于分解伴随气体（$ hbox {O} _ {2} $，压缩空气）的$ hbox {SF} _ {6} $。考虑了应用微波功率和添加气体种类作为销毁和去除效率（DRE）的有效参数。公认的是，压缩空气是一种比氧气更有效的去除hbox {SF} _ {6} $的添加剂气体。而且，DRE高度依赖于正向功率的变化。使用氧气和压缩空气作为添加气体时的最高效率分别为98.4％和99.1％（在1100 W中）。在某些情况下，$ hbox {N} _ {2} $也与$ hbox {SF} _ {6} $一起使用，导致最高效率（1100 W）为99.4％。本文认为，维持在大气压下的微波等离子体炬几乎可以完全去除半导体行业的$ hbox {SF} _ {6} $。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号