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VOLATILE ORGANIC ACHIEVEMENTS

机译：挥发性有机成就

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The regenerative thermal oxidizer (RTO) is one of the standard pieces of equipment used to control the emission of volatile organic compounds (VOCs) in the semiconductor industry. An RTO uses a regenerative heat exchange in two or more packed beds operated with periodic flow reversals. The beds, filled with an inert ceramic media, are connected by a combustion chamber where one or more fuel burners are installed for system startup, and to maintain necessary temperature at low concentrations of VOCs. Despite the high degree of energy regeneration, RTOs can still require high fuel consumption -- especially at high airflow rates. The actual fuel consumption in the original and retrofitted units was estimated based on the measured temperatures, VOC loadings and flow rates. The method of estimations was based on a heat balance accounting for energy spent for heating the process gas and combustion air, and useful heat from VOC oxidation.
机译：再生热氧化器（RTO）是用于控制半导体行业中挥发性有机化合物（VOC）排放的标准设备之一。 RTO在两个或多个填充床中进行再生热交换，并定期进行换流。装有惰性陶瓷介质的床通过燃烧室连接，在燃烧室中安装了一个或多个燃料燃烧器以启动系统，并在低VOC浓度下保持必要的温度。尽管能量再生程度很高，但RTO仍然需要很高的燃料消耗-特别是在高气流速率下。根据测得的温度，VOC负荷和流速估算原始和翻新单元中的实际燃料消耗。估算方法基于热量平衡，该热量平衡用于加热过程气体和燃烧空气所消耗的能量，以及来自VOC氧化的有用热量。

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  • 来源
    《Pollution Engineering》 |2009年第11期|p.30-33|共4页
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    John D Miller Tina Gilliland Grigori A Bunimovich Yurii Sh Matros;

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    By JOHN D. MILLER and TINA GILLILAND, Texas Instruments, and GRIGORI A. BUNIMOVICH and YURII SH. MATROS, Matros TechnologiesJohn D. Miller is project manager, Texas Instruments Inc., Dallas. He can be reached by e-mail at j-miller4@ti.com or call (214) 882-4166. Tina Gilliland is air-permitting manager at Texas Instruments, e-mail t-gilliland@ti.com or call (972) 927-3022. Grigori A. Bunimovich is director of catalyst applications, Matros Technologies Inc., Chesterfield, Mo., e-mail grigorii@matrostech. com or call (314) 439-9921. Yurii Sh. Matros is president of Matros Technologies Inc., e-mail: yurii@matrostech.com or call (314) 439-9699.Use the search engine at www.pollutionengineering. com with the following key words to find other articles and products for similar topics.RTO, RCO, Catalyst,;

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