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首页> 外文期刊>精密工学会誌 >Small length measurement using regular crystalline lattice for reference (1st report) -Determining the geometrical distortion of raw STM image and correcting it by two dimensional FFT analysis-
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Small length measurement using regular crystalline lattice for reference (1st report) -Determining the geometrical distortion of raw STM image and correcting it by two dimensional FFT analysis-

机译：使用常规晶格进行小尺寸测量作为参考（第一份报告）-确定原始STM图像的几何变形并通过二维FFT分析进行校正-

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摘要

This paper presents a potential image processing method to determine the in-plane geometrical distortion of an STM image and to calibrate it using a regular crystalline lattice. The method is based on two-dimensional FFT Analysis, that is, the dimension of a raw STM image is calibrated through comparing the two-dimensional power Spectrum of the raw STM image with the ideal one of a regular crystalline lattice. A dual tunneling unit STM with One-Xy-Y stage and two tunneling unit independently controlled in the two Z-axes has been utilized for comparative Length measurement using a regular crystalline lattice as reference scale.
机译：本文提出了一种潜在的图像处理方法，用于确定STM图像的面内几何变形并使用规则的晶格对其进行校准。该方法基于二维FFT分析，即通过将原始STM图像的二维功率谱与理想的晶格之一进行比较，来校准原始STM图像的尺寸。具有一个Xy-Y级的双隧穿单元STM和在两个Z轴中独立控制的两个隧穿单元已被用于使用常规晶格作为参考尺度的比较长度测量。

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