High-rigidity multi-degrees-of-freedom fine motion mechanism using piezoelectric actuators (3rd report)

Akira Kyusojin; Yosiaki Yamamoto; Hiromi Isobe

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High-rigidity multi-degrees-of-freedom fine motion mechanism using piezoelectric actuators (3rd report)

机译：使用压电致动器的高刚性多自由度微动机构（第三次报告）

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Recently, high-precision positioning is increasingly required in precision manufacturing, measuring instrument and so on. The purpose of this study is to develop a new type mechanism which is capable of fine positioning with five DOF, high rigidity and heavy load capability. It consists of three plates and six piezoelectric actuators. Each actuator has a flexible end which is deformed and inclined to perform the motions of X,Y,Z, α and β with controlled piezo expansion. Since this mechanism has neither guide way nor lubrication, it is operated without friction, wear and backlash.

机译：近来，在精密制造，测量仪器等中越来越需要高精度定位。这项研究的目的是开发一种新型的机构，该机构能够以五个自由度精确定位，具有高刚度和重载能力。它由三个板和六个压电致动器组成。每个执行器都有一个挠性端，该挠性端变形并倾斜以在受控的压电膨胀下执行X，Y，Z，α和β的运动。由于该机构既无导向也无润滑，因此无摩擦，无磨损和无间隙运行。

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来源
《精密工学会誌》 |1997年第2期|p.223-227|共5页
作者
Akira Kyusojin; Yosiaki Yamamoto; Hiromi Isobe;
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原文格式 PDF
正文语种 jpn
中图分类机械制造工艺;仪器、仪表;
关键词
multi degrees-of-freedom mechanism; fine motion mechanism; piezoelectric actuator;

机译：多自由度机制;精细运动机构压电执行器;

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1. Development of Spatial In-Parallel Actuated Manipulators with Six Degrees of Freedom with High Motion Transmissibility (3rd Report, Performance Evaluation of High Speed Positioning Based on Actuator Power) [J] . Yukio TAKEDA, Hiroaki FUNABASHI, Kazutaka NAKAJIMA 日本機械学会論文集. C編 . 1999,第630期

机译：六自由度，高运动可传递性的空间并联执行器的开发（第3次报告，基于执行器功率的高速定位性能评估）
2. A new motion mode of a parasitic motion principle (PMP) piezoelectric actuator by preloading the flexible hinge mechanism [J] . Yang Zhixin, Zhou Xiaoqin, Huang Hu, Sensors and Actuators, A. Physical . 2019,第期

机译：通过预加载柔性铰链机构的寄生运动原理（PMP）压电致动器的新运动模式
3. Scanning electron microscope fine tuning using four-bar piezoelectric actuated mechanism [J] . Khaled S. Hatamleh, Qais A. Khasawneh, Adnan Al-Ghasem, Elektrotechnicky Casopis/Journal of Electrical Engineering . 2018,第1期

机译：使用四杆压电致动机构的扫描电子显微镜微调
4. Development of a high precision mounting robot system with fine motion mechanism (5th report): positioning experiments of SCARA robot with two-axes fine motion mechanism [C] . Ghaylen Limam, Abdelhafid Omari, Aiguo Ming, 精密工学会学術講演会 . 2001

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5. Multi-degrees-of-freedom Wireless Actuation of Small Magnetic Mechanisms [D] . Salmanipour, Sajad . 2020

机译：小型磁力机制的多程度自由度无线致动
6. A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion [O] . Xiangyu Gao, Zhanmiao Li, Jingen Wu, 2019

机译：用于产生宏观和纳米运动的压电和电磁双机构多模式线性执行器
7. High-Rigidity Multi-Degrees-of-Freedom Fine Motion Mechanism using Piezoelectric Actuators (3rd Report) [O] . Akira KYUSOJIN, Yosiaki YAMAMOTO, Hiromi ISOBE 1997

机译：使用压电执行器（第3次报告）的高刚性多程度的精细运动机制

High-rigidity multi-degrees-of-freedom fine motion mechanism using piezoelectric actuators (3rd report)

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