Study on aspherical surface polishing of single crystal silicon lens

Hirofumi Suzuki; Sunao Kodbra; Tomoaki Nakasuji

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Study on aspherical surface polishing of single crystal silicon lens

机译：单晶硅透镜非球面抛光的研究

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Aspherical lenses of single crystal silicon (Si) are used for the scope and the camera of infrared wavelength, because the very large refractive index of the material leads to substantial reflection loss. These aspherical lenses of infrared wavelength materials were manufactured by diamond cutting. But the single crystal silicon is a hard and brittle material, it is difficult to obtain a mirror Surface without a micro crack when the lens diameter is large. In this case, aspherical polishing has to be applied after diamond cutting in order to generate an aspherical surface most precisely.

机译：单晶硅（Si）的非球面透镜用于红外波长的示波器和摄像机，因为该材料的非常大的折射率会导致相当大的反射损耗。这些红外波长材料的非球面透镜是通过金刚石切割制造的。但是单晶硅是硬而脆的材料，当透镜直径大时，难以获得没有微裂纹的镜面。在这种情况下，必须在金刚石切割后进行非球面抛光，以最精确地生成非球面。

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来源
《精密工学会誌》 |1997年第9期|p.1280-1284|共5页
作者
Hirofumi Suzuki; Sunao Kodbra; Tomoaki Nakasuji;
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原文格式 PDF
正文语种 jpn
中图分类机械制造工艺;仪器、仪表;
关键词
infrared lens of single crystal silicon; aspherical surface polishing; small rotating tool;

机译：单晶硅红外透镜;非球面抛光;小型旋转工具;

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专利

1. Study on precision polishing of micro aspherical surface: precision polishing of single crystal LiNbO{sub}3 optical wave-guide lens [J] . Hirofumi Suzuki, Toshiro Higuchi, Takayuki Kitajima, 砥粒加工学会誌 . 2000,第3期

机译：微非球面精密抛光研究：单晶LiNbO {sub} 3光波导透镜的精密抛光
2. Study on precision polishing of micro aspherical surface: precision polishing of single crystal LiNbO{sub}3 optical wave-guide lens [J] . Hirofumi Suzuki, Toshiro Higuchi, Takayuki Kitajima, 砥粒加工学会誌 . 2000,第3期

机译：微型非球面精密抛光的研究：单晶LINBO {SUB} 3光波导透镜的精密抛光
3. The crystallographic change in sub-surface layer of the silicon single crystal polished by chemical mechanical polishing [J] . J. Xu, J. B. Luo, L. L. Wang, Tribology International . 2007,第2期

机译：化学机械抛光法抛光的硅单晶亚表层的晶体学变化
4. On machine polishing of ultraprecision diamond ground aspherical surfaces on multispectral CVD ZnS lens [C] . Zhimin Rao, Qingliang Zhao, Bing Guo International Conference of the European Society for Precision Engineering and Nanotechnology . 2016

机译：在多光谱CVD Zns镜头上超出钻石磨碎的机器抛光
5. HIGH SPEED FABRICATION OF ASPHERIC SURFACES (OPTICAL, CAM, LENS, POLISH, GENERATE). [D] . ATKINSON, LELAND GUY, III. 1986

机译：球形表面的高速制造（光学，凸轮，镜片，抛光，生成）。
6. Effects of Anisotropy on Single Crystal Silicon in Polishing Non-Continuous Surface [O] . Guilian Wang, Zhijian Feng, Yahui Hu, 2020

机译：各向异性在抛光非连续表面中单晶硅的影响
7. Comparative analysis on surface property in anodic oxidation polishing of reaction-sintered silicon carbide and single-crystal 4H silicon carbide [O] . 2016

机译：反应烧结碳化硅和单晶4H碳化硅阳极氧化抛光表面性能的比较分析
8. Subsurface structure in polished fused silica and diamond turned single crystal211 silicon [R] . Carr, J. W., Fearon, E., Haack, J., 1999

机译：抛光熔融硅和金刚石转变为单晶211硅的次表面结构

Study on aspherical surface polishing of single crystal silicon lens

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