机译:以sa /钴为唯一溶剂的液相外延生长单晶碳化硅
Department of Mechanical Engineering, Southern Taiwan University,Taiwan;
Department of Materials Science and Engineering, National Cheng Kung University, Taiwan;
Department of Materials Science and Engineering, National Cheng Kung University, Taiwan;
KINIK Company, Taiwan;
Department of Materials Science and Engineering, National Cheng Kung University, Taiwan Center for Micro/Nano Science and Technology, National Cheng Kung University, Taiwan Research Center for Energy Technology and Strategy, National Cheng Kung University, Taiwan National Cheng Kung University, Tainan 70101, Taiwan;
Semiconductors; thin films; crystal growth; scanning electron microscopy; transmission electron microscopy;
机译:金属溶剂对碳化硅低温液相外延的实验评估
机译:低温液相外延生长重质p型碳化硅厚层
机译:低温液相外延中碳化硅的生长方式
机译:通过液相外延生长在LiNbO_3 / LiTaO_3单晶膜上通过电感耦合等离子体刻蚀制造波导
机译:静态和旋转磁场对硅锗单晶液相扩散生长影响的数值模拟研究
机译:用于热电应用的高掺杂n型SiGe晶体的压敏液相外延
机译:使用硅的多组分金属溶液通过液相外延在非硅衬底上沉积多晶硅
机译:用行程溶剂等方法研究单晶碳化硅的生长