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首页> 外文期刊>Proceedings of the Institution of Mechanical Engineers. Part L, Journal of Materials: Design and Application >Electroplating of CoNiMnP-based permanent magnet and its application in bidirectionally actuated micro-electro-mechanical systems
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Electroplating of CoNiMnP-based permanent magnet and its application in bidirectionally actuated micro-electro-mechanical systems

机译:CoNiMnP基永磁体的电镀及其在双向驱动微机电系统中的应用

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摘要

This article reports the preparation and characterization of CoNiMnP-based permanent magnetic material using various sulphate and chloride solutions under different conditions. Five samples are under study, and all the five samples show vertical magnetic anisotropy, among which sample 5 electroplated from the low concentration chloride solution under external magnetic field demonstrates the best magnetic properties with coercivity of 2632 Oe, remanence of 0.2 T, and maximum magnetic energy density of 10.185 kJ/m~3. Experiments indicate that an array structure rather than a monolithic plate can suppress the stress and enhance the adhesion between the electroplated layer and the seed layer. Furthermore, the resistivity of the electroplated CoNiMnP is measured as 160-200 μΩ cm. The low-stress electroplated CoNiMnP-based permanent magnetic material has potential for bidirectional actuators in micro-electro-mechanical system applications such as micropump, microswitch, and microgripper.
机译:本文报道了在不同条件下使用各种硫酸盐和氯化物溶液制备和表征基于CoNiMnP的永磁材料的特性。正在研究五个样品,所有五个样品均显示垂直磁各向异性,其中在低磁场下从低浓度氯化物溶液中电镀的样品5表现出最佳的磁性能,矫顽力为2632 Oe,剩磁为0.2 T,最大磁能量密度为10.185 kJ / m〜3。实验表明,阵列结构而不是整体板可以抑制应力并增强电镀层与晶种层之间的附着力。此外,测得电镀的CoNiMnP的电阻率为160-200μΩcm。低应力电镀CoNiMnP基永磁材料在微机电系统应用(例如微型泵,微型开关和微型夹具)中具有双向执行器的潜力。

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