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Surface-micromachined microoptical elements and systems

机译：表面微加工的微光学元件和系统

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Optical systems are ubiquitous in the present-day societal fabric, from sophisticated fiber-optic telecommunication infrastructure to visual information display, down to mundane chores such as bar-code reading at the supermarket. Most of these existing systems are built from bulk optical components, as they have been for many years. Just as miniaturization and batch-process production have revolutionized electronics, similar advances in optics will certain greatly expand its applications and markets. Production techniques for optical systems that employ the emerging micro-electromechanical systems (MEMS) technologies give promise of achieving this success. Simple micromechanical fabrication techniques are already employed in fiber-optic components to produce what is generally described as silicon-optical-bench systems. New developments, especially those permitting the use of microactuated structures, make substantial increases in system sophistication possible. Surface micromachining, in which microoptical systems are batch-fabricated and placed on top of a silicon wafer, has become a promising approach to this progression. With the demonstration that surface-micromachined elements can be "folded" out from the plane in which they are constructed, an important new degree of design freedom has emerged. This paper examines some of the results obtained and attempts to project possibilities for surface micromachining in future optical systems.
机译：光学系统在当今的社会结构中无处不在，从复杂的光纤电信基础设施到视觉信息显示，再到日常琐事，例如在超市阅读条形码。这些现有系统中的大多数都是使用大块光学组件构建的，就像它们已经使用了很多年一样。就像微型化和批量生产已经彻底改变了电子学一样，光学器件的类似进步必将极大地扩展其应用和市场。采用新兴的微机电系统（MEMS）技术的光学系统生产技术有望实现这一成功。简单的微机械制造技术已经用于光纤组件中，以生产通常称为硅光台系统的系统。新的发展，特别是那些允许使用微致动结构的发展，使得系统复杂性的大幅提高成为可能。表面微机械加工已成为实现这一进展的一种有前途的方法，在这种技术中，微光学系统是分批制造并放置在硅晶片顶部的。通过演示可以将表面微机械加工的元件从其制造所在的平面“折叠”起来，出现了一种新的重要的设计自由度。本文研究了一些获得的结果，并尝试预测在未来的光学系统中进行表面微加工的可能性。

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