SUPPORT, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT MEASUREMENT APPARATUS, DEVICE MANUFACTURING METHOD

摘要

[0008] In an embodiment, it is aimed to provide a support which has improved dynamic properties. [0009] According to an embodiment of the invention, a support is provided which comprises: 1. a first end portion and a second end portion wherein the second end portion is on the side opposite lo the first end portion in a longitudinal direction of the support, 2. a coil spring which is arranged between the first end portion and the second end portion, which coil spring comprises: 2.1. a first spiral member which extends between the first end portion and the second end portion in a circumferential direction of the support, and 2.2. a second spiral member which extends between the first end portion and the second end portion in a circumferential direction of the support, wherein the first spiral member of the coil spring and the second spiral member of the coil spring are moveable relative to each other. wherein the support further comprises a damper device which is attached to the first spiral member. [00010] In accordance with this embodiment, the support comprises a first end portion and a second end portion, and a coil spring which extends between the first end portion and the second end portion. The firsl end portion for example has a body engagement face which is adapted to engage a body to be supported. The a second end portion for example has a bearing surface engagement face which is adapted to engage a load bearing surface onto which the body is to be supported. [00011] The coil spring comprises a first spiral member and a second spiral member. Optionally, a different number of spiral members is present, for example three, four, five or six spiral members. Optionally, the longitudinal axis of the first spiral member coincides with the longitudinal axis of the second spiral member. [00012] The first spiral member and the second spiral member of the coil spring arc movcablc relative to each other. It has been observed that at relatively high frequencies, e.g. frequencies above 1 kHz, e.g. between 1400 Hz and 1600 Hz, at a certain vibration frequency the first spiral member may have a different vibration mode shape than the second spiral member. [00013] In accordance with this embodiment of the invention, a damper device is attached to the first spiral member. This damper device reduces the displacement of the first spiral member at at least one location between two adjacent nodes of a vibration mode shape of the first spiral member, e.g. in a vibration mode shape which is present in the first spiral member at a frequency which is 1 kHz or higher. [00014] Therewith, the dynamic behaviour of the support is improved, optionally without introducing a significant additional mass and/or a significant additional stiffness. [00015] In an embodiment of the support according to the invention, the damper device is configured to dampen movement of the first spiral member relative to at least one of the first end portion, the second end portion and/or the second spiral member. [00016] In this embodiment, the local displacement of at least one part of the first spiral member relative lo the first end portion and/or to the second end portion and/or to the second spiral member is reduced. [00017] In an embodiment of the support according to the invention, the first spiral member of the coil spring and the second spiral member of the coil spring are moveahle relative to each other in the longitudinal direction of the support. [00018] This embodiment allows for a practical implementation of the invention. [00019] In an embodiment of the support according to the invention, the first spiral member has a vibration mode shape associated with a vibration frequency, which vibration mode shape comprises an anti-node, and wherein the second spiral member has a vibration mode shape associated with said vibration frequency which vibration mode shape of the second spiral member comprises a node. [00020] The damper can in some embodiments be most effective when it is connected to the first spiral member at the position of an anti-node of the vibration mode shape for which damping is desired. At the location of an anti-node, the displacement is larger than at other locations of the spiral member. [00021] In an embodiment of the support according lo the invention, the coil spring comprises at least one free spiral member which is not in engagement with the damper device. The free spiral member is the second spiral member and/or a further spiral member other than the first or the second spiral member. [00022] The presence of a free spiral member helps to prevent that the static stiffness of the support is increased too much by the application of the damper device. [00023] In an embodiment of the support according to the invention, the damper device comprises a first damper body comprising a material having vibration dampening properties, wherein said first damper body optionally has a first connector surface which is connected to the f

机译：[0008]在一个实施例中，旨在提供具有改进的动态特性的支撑。根据本发明的实施例，提供了一种支撑件，其包括：1。第一端部和第二端部，其中第二端部位于与第一端部的纵向相对的侧面上支撑，2.螺旋弹簧布置在第一端部和第二端部之间，螺旋弹簧包括：2.1。第一螺旋构件在第一端部和第二端部之间沿支撑件的圆周方向延伸，并且2.2。第二螺旋构件在支撑件的圆周方向上延伸在第一端部和第二端部之间，其中螺旋弹簧的第一螺旋构件和螺旋弹簧的第二螺旋构件可相对于彼此移动。其中，支撑件还包括阻尼装置，该阻尼装置附接到第一螺旋构件。根据该实施例，支撑件包括第一端部和第二端部，以及在第一端部和第二端部之间延伸的螺旋弹簧。例如，FiRS1端部具有身体接合面，其适于接合待支撑的身体。例如，第二端部具有轴承表面接合面，该轴承表面接合面适于接合在该承载表面上接合在该承载表面上的负载表面。 [00011]螺旋弹簧包括第一螺旋构件和第二螺旋构件。可选地，存在不同数量的螺旋构件，例如三个，四个，五个或六个螺旋构件。可选地，第一螺旋构件的纵向轴线与第二螺旋构件的纵向轴线重合。 [00012]第一螺旋构件和螺旋弹簧的第二螺旋构件相对于彼此相对于彼此。已经观察到，在相对较高的频率下，例如，频率高于1 kHz，例如，在1400Hz和1600Hz之间，在一定的振动频率下，第一螺旋构件可以具有与第二螺旋构件不同的振动模式形状。根据本发明的该实施例，阻尼装置附接到第一螺旋构件。该阻尼器装置在第一螺旋构件的振动模式形状的两个相邻节点之间的至少一个位置处减小第一螺旋构件的位移，例如，例如第一螺旋构件的两个相邻节点之间。在振动模式形状，其以1kHz或更高的频率存在于第一螺旋构件中。因此，可选地改善了支撑件的动态行为，而不会引入显着的额外质量和/或显着的附加刚度。在根据本发明的支撑件的一个实施例中，阻尼装置被配置为使第一螺旋构件相对于第一端部，第二端部和/或第二螺旋构件中的至少一个抑制第一螺旋构件的运动。在该实施例中，减小了第一螺旋构件的至少一部分的局部位移，第一端部和/或向第二端部和/或第二螺旋构件减小。在根据本发明的支撑件的一个实施例中，螺旋弹簧的第一螺旋构件和螺旋弹簧的第二螺旋构件在支撑件的纵向方向上相对于彼此移动。该实施例允许本发明的实际实现。在根据本发明的支撑件的一个实施例中，第一螺旋构件具有与振动频率相关联的振动模式形状，振动模式形状包括防节点，并且其中第二螺旋构件具有振动模式形状与所述振动频率相关联的第二螺旋构件的振动模式形状包括节点。在一些实施例中，阻尼器可以在其在振动模式形状的反节点的位置连接到第一螺旋构件时是最有效的。在反节点的位置，位移大于螺旋构件的其他位置。在根据本发明的支撑件的实施例中，螺旋弹簧包括至少一个自由螺旋构件，其不与阻尼器装置接合。自由螺旋构件是第二螺旋构件和/或除第一或第二螺旋构件之外的另一螺旋构件。自由螺旋构件的存在有助于防止载体的静态刚度通过抽吸装置的施加而增加太多。在根据本发明的支撑件的一个实施例中，阻尼装置包括第一阻尼体，该第一阻尼体包括具有振动阻尼性能的材料，其中所述第一阻尼器主体可选地具有连接到F的第一连接器表面

SUPPORT, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT MEASUREMENT APPARATUS, DEVICE MANUFACTURING METHOD

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