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首页> 外文期刊>Review of Scientific Instruments >Small angular displacement measurement based on an autocollimator and a common-path compensation principle
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Small angular displacement measurement based on an autocollimator and a common-path compensation principle

机译：基于自准直仪和共路径补偿原理的小角位移测量

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摘要

A novel method for small angular displacement measurement based on an autocollimator and a common-path compensation principle by using single CCD detector was proposed. The principles of the angular displacement measurement and the common-path compensation were analyzed. The feasibility of measurement method was verified and the experimental results revealed that the linear correlativity between the relative displacement of the measuring beam spot and the angular displacement is 0.99996. And the measurement resolution is about 0.03 arcsec. To test the compensation's effect, a series of experiments introducing three different interferences from system and external environment were performed. The experimental results indicated that the standard deviations of the measuring beam spot's angular drift were improved by at least 25.0% to at most 80.0% in x direction while by at least 28.2% to at most 95.6% in y direction. Thus, the stability of the system and the measurement resolution were improved.
机译：提出了一种基于自动准直仪和共路径补偿原理的单CCD检测器小角度位移测量的新方法。分析了角位移测量和共通补偿的原理。验证了测量方法的可行性，实验结果表明，测量光束点的相对位移与角位移之间的线性相关性为0.99996。测量分辨率约为0.03 arcsec。为了测试补偿的效果，进行了一系列实验，介绍了来自系统和外部环境的三种不同干扰。实验结果表明，测量光束点角位移的标准偏差在x方向上提高了至少25.0％，至多为80.0％，而在y方向上提高了至少28.2％，至多为95.6％。因此，提高了系统的稳定性和测量分辨率。

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