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Holographic common-path interferometer for angular displacement measurements with spatial phase stepping and extended measurement range

机译：全息共径干涉仪，用于空间相位步进和扩展测量范围的角位移测量

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摘要

A novel technique for extending the unambiguous measurement range for differential measurements of angular deflections is presented. The technique utilizes a common-path interferometer that simultaneously probes the out-of-plane displacement of three points on the object surface. The system is based on a single laser diode, and all the optical functions of the system are implemented in a dedicated holographic optical element (HOE). The HOE automatically provides spatially phase-stepped interference signals for real-time phase measurement. It is therefore not necessary to employ any polarizing optics or active elements to introduce the phase stepping. The common-path scheme combined with the HOE provides a system that is inherently stable, since the HOE operates as both transmitter and receiver in the system. The system is compact, is robust, and has the potential for being mass-produced at a low cost and is thus well suited for industrial use, such as in commercial vibrometers. The technique is demonstrated in a system for measuring angular deflections of a plane mirror. The technique, however, is not restricted to this use alone and can easily be configured to probe other types of surface displacements, e.g., the deflection of a diaphragm. In the present configuration, the system can measure angular deflections with a sensitivity of 2.5×10~(-7) rad over a measurement range that is approximately 3.5×10~(-3) rad, i.e., a dynamic range of approximately 1:14,000. Furthermore, the system can easily be reconfigured for a desired angular sensitivity and measurement range.
机译：提出了一种新颖的技术，用于扩展明确的测量范围以进行角偏转的差分测量。该技术利用了一个共通路径干涉仪，该干涉仪可同时探测物体表面上三个点的平面外位移。该系统基于单个激光二极管，并且系统的所有光学功能均在专用的全息光学元件（HOE）中实现。 HOE自动提供空间相位步进干扰信号以进行实时相位测量。因此，没有必要采用任何偏振光学器件或有源元件来引入相位步进。由于HOE在系统中既作为发送器又作为接收器，因此与HOE结合的公共路径方案提供了固有的稳定性。该系统结构紧凑，坚固耐用，并且具有以低成本大量生产的潜力，因此非常适合工业用途，例如商业振动计。该技术在用于测量平面镜角度偏转的系统中得到了证明。然而，该技术不仅限于这种用途，并且可以容易地配置成探测其他类型的表面位移，例如隔膜的挠曲。在本配置中，系统可以在大约3.5×10〜（-3）rad的测量范围（即大约1的动态范围）内以2.5×10〜（-7）rad的灵敏度测量角偏转。 14,000此外，可以轻松地将系统重新配置为所需的角度灵敏度和测量范围。

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