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Note: Focus error detection device for thermal expansion-recovery microscopy (ThERM)

机译:注意:用于热膨胀恢复显微镜(ThERM)的聚焦误差检测装置

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摘要

An innovative focus error detection method is presented that is only sensitive to surface curvature variations, canceling both thermoreflectance and photodefelection effects. The detection scheme consists of an astigmatic probe laser and a four-quadrant detector. Nonlinear curve fitting of the defocusing signal allows the retrieval of a cutoff frequency, which only depends on the thermal diffusivity of the sample and the pump beam size. Therefore, a straightforward retrieval of the thermal diffusivity of the sample is possible with microscopic lateral resolution and high axial resolution (∼100 pm).
机译:提出了一种创新的聚焦误差检测方法,该方法仅对表面曲率变化敏感,可以消除热反射和光偏转效应。该检测方案包括一个散光探测激光器和一个四象限检测器。离焦信号的非线性曲线拟合允许获取截止频率,该截止频率仅取决于样品的热扩散率和泵浦光束尺寸。因此,可以通过微观横向分辨率和高轴向分辨率(〜100 pm)直接获取样品的热扩散率。

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