...
首页> 外文期刊>Review of Scientific Instruments >High Temperature Camera for X‐Ray Topography
【24h】

High Temperature Camera for X‐Ray Topography

机译:用于X射线地形的高温摄像机

获取原文
获取原文并翻译 | 示例
           

摘要

A high temperature x‐ray camera suited for transmission topography is described. The camera is capable of continuous operation at 900°C. The camera chamber can either be evacuated or used with an inert atmosphere. The stresses in a silicon wafer due to a thin vapor decomposed silicon oxide were followed during heating and cooling, by observing a series of topographs. Clear, large area topographs are seen even at the high temperature range.
机译:描述了适合透射形貌的高温X射线照相机。该摄像机能够在900°C的温度下连续运行。摄像机室可以抽成真空,也可以在惰性气氛下使用。在加热和冷却期间,通过观察一系列的形貌来追踪由于薄的蒸气分解的氧化硅所导致的硅晶片中的应力。即使在高温范围内也可以看到清晰的大面积地形图。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号