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Calibration and Applications of a High-Precision Piezo Scanner for Nanometrology

机译：纳米计量学高精度压电扫描仪的标定与应用

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摘要

Piezoelectric tube scanners are being used with many scanning probe microscopes for scanning sample surfaces in three dimensions. Since the piezo effect has nonlinearity, hysteresis, and drift, difficulties will occur with distortion, reproducibility, and accuracy of measurements (Barrett and Quate 1991). Correction procedures, which are not based on improvement of linearity of scan movements, will still be affected by remaining nonlinearities of an order of a few percent. The manufacturing of increasing amounts of miniaturized structures for microsystems and semiconductors, as well as certification of standards and measuring devices, will, however, require higher accuracy of profile measurements in the submicrometer and nanometer range. This publication describes a scanner which has a nonlinearity of < 0.05%, a procedure for calibration and detection of nonlinearity, as well as some applications. The calibration technique is based on the fact that manufacturing and measurement of optical diffraction gratings can be very well controlled, allowing light wavelength as an indirect reference in the nanometer range (Antrak 1993, Bartzke et al. 1993, Grunewald 1993, Hutley 1982).
机译：压电管扫描仪已与许多扫描探针显微镜一起使用，以扫描三维样品表面。由于压电效应具有非线性，磁滞和漂移，因此在失真，可再现性和测量精度方面会出现困难（Barrett和Quate 1991）。并非基于改善扫描运动的线性的校正程序，仍然会受到百分之几数量级的非线性影响。然而，越来越多的用于微系统和半导体的微型结构的制造以及标准和测量设备的认证，将要求亚微米和纳米范围内的轮廓测量具有更高的精度。该出版物描述了具有＜0.05％的非线性的扫描仪，用于非线性的校准和检测的程序以及一些应用。校准技术基于以下事实：可以很好地控制光学衍射光栅的制造和测量，从而允许将光波长作为纳米范围内的间接参考（Antrak 1993，Bartzke等，1993； Grunewald，1993； Hutley，1982）。

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